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公开(公告)号：EP2839053B1
公开(公告)日：2017-05-31
申请号：EP12716980.3
申请日：2012-04-16
申请人： The Timken Company
发明人： FOWLER, Richard, J. , GROSSI, Nickolas, A. , SMITH, Doug, H. , DOLL, Gary, L. , EVANS, Ryan, D.
CPC分类号： H01J37/3411 , C23C14/0057 , C23C14/35 , C23C14/505 , C23C16/4584 , H01J2237/3323
摘要： A method of coating spherical components with a coating process in which the spherical components have a surface area includes positioning the spherical components within a containment boundary on a moving member and positioning the moving member within a chamber. The method includes reducing the pressure within the chamber to less than one atmosphere. The method also includes revolving the moving member about a longitudinal axis. The method further includes oscillating the moving member in a direction of the longitudinal axis and commencing the coating process. The oscillating and revolving produce motion of the spherical components within the containment boundary such that an entirety of the surface area of each component is exposed to the coating process.
摘要翻译： 具有涂层方法，其中所述球形部件具有一个表面区域包括移动构件上定位一个容纳边界内的球形部件和一个腔室中的移动构件定位涂覆球形组分的方法。 该方法包括减少在腔室内的压力小于1个大气压。 因此，该方法包括：旋转围绕纵向轴线的移动构件。 该方法包括进一步的振荡在纵向轴的方向移动部件，并在开始涂覆过程。 容纳边界搜索内的球形部件的振荡和旋转产生运动做在整体的各成分的表面区域暴露于所述涂覆过程。
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公开(公告)号：EP2839053A1
公开(公告)日：2015-02-25
申请号：EP12716980.3
申请日：2012-04-16
申请人： The Timken Company
发明人： FOWLER, Richard, J. , GROSSI, Nickolas, A. , SMITH, Doug, H. , DOLL, Gary, L. , EVANS, Ryan, D.
IPC分类号： C23C14/50
CPC分类号： H01J37/3411 , C23C14/0057 , C23C14/35 , C23C14/505 , C23C16/4584 , H01J2237/3323
摘要： A method of coating spherical components with a coating process in which the spherical components have a surface area includes positioning the spherical components within a containment boundary on a moving member and positioning the moving member within a chamber. The method includes reducing the pressure within the chamber to less than one atmosphere. The method also includes revolving the moving member about a longitudinal axis. The method further includes oscillating the moving member in a direction of the longitudinal axis and commencing the coating process. The oscillating and revolving produce motion of the spherical components within the containment boundary such that an entirety of the surface area of each component is exposed to the coating process.
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公开(公告)号：EP2973642A1
公开(公告)日：2016-01-20
申请号：EP14721591.7
申请日：2014-03-11
申请人： The Timken Company
IPC分类号： H01J37/32
CPC分类号： H01R39/643 , C23C14/505 , C23C16/4584 , C23C16/4586 , C23C16/50 , H01J37/32 , H01J37/32577 , H01J37/32706 , H01J37/32715
摘要： A coupling (30) for the introduction of a bias voltage into a vacuum chamber. The coupling consists of a metallic ball bearing assembly (36), a bearing sleeve or cup (34), and an EMI shielding gasket (42) seated within the bearing sleeve or cup. The ball bearing assembly is fitted within the EMI shielding gasket, about a metallic shaft (32) which, in turn, is coupled to a source of the bias voltage. The bearing sleeve or cup is, in turn, coupled to a rotating component such as a platen, for receiving the bias voltage within the vacuum chamber.
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公开(公告)号：EP2973642B1
公开(公告)日：2019-05-08
申请号：EP14721591.7
申请日：2014-03-11
申请人： The Timken Company
IPC分类号： H01J37/32
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