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发明授权
EP2993521B1 CHEMICALLY AMPLIFIED POSITIVE RESIST DRY FILM, DRY FILM LAMINATE AND METHOD OF PREPARING LAMINATE 有权
化学增强正涂料干膜，干膜层压结构及其制造方法层压

CHEMICALLY AMPLIFIED POSITIVE RESIST DRY FILM, DRY FILM LAMINATE AND METHOD OF PREPARING LAMINATE
摘要：
A chemically amplified positive resist dry film to be formed on a support film contains 5-40 wt% of a component having a boiling point of 55-250°C under atmospheric pressure. The resist dry film having flexibility and dimensional stability can be prepared through simple steps. The resist dry film can be efficiently and briefly laid on an article and processed to form a pattern.
摘要（中）：

一种化学放大型正型抗蚀剂干膜，要在载体上形成的膜，含有具有55-250℃，在大气压下的沸点的组分的5-40重量％。 抗蚀剂干具有薄膜柔韧性和尺寸稳定性可通过简单的步骤来制备。 抗蚀剂干膜，可以有效地和简单地在制品放置在并处理以形成图案。

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