发明授权
EP3071931B1 IN-BAND BEATING REMOVAL FOR A MEMS GYROSCOPE 有权
针对MEMS陀螺仪的带内跳动

IN-BAND BEATING REMOVAL FOR A MEMS GYROSCOPE
摘要:
A vibration gyroscope circuitry (VCIRC) connectable to a vibrating MEMS gyroscope (VMEMS). The circuitry comprises drive circuitry (DRIVE) arranged to drive, when the circuitry is connected, the vibration MEMS gyroscope (VMEMS) and a measurement unit (DMU) which provides a drive measurement voltage signal (DMV) forming a measure of a displacement of a mass along a drive axis. A sense circuitry (SENSE) is arranged to process a sense measurement signal of the vibration MEMS gyroscope (VMEMS) forming a measure for a displacement of the mass along a sense axis. A digital sample clock generator (SCG) is arranged to generate a sample clock signal (SCLK) from an input signal (FDxy) derivable from a drive measurement voltage signal (DMV). The sample clock generator (SCG) comprises an oscillator (HFOSC) arranged to generate a master clock (MOSC), and a counter unit (OSCCNTR) arranged to count master clock periods during one period of the input signal. The clock generator also comprises a number count monitor (NCM) arranged to determine during how many input signal periods the number count stays constant, and to compare the number of constant periods (Ncp) with a critical number of constant periods (Ncp_crit). A frequency shifter (FSH) will trigger the oscillator to shift the master clock frequency whenever the number count monitor (NCM) has determined that the number of constant periods (Ncp) exceeds the critical number of constant periods (Ncp_crit).
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