发明公开
- 专利标题: INSTANTANEOUS PHASE-SHIFT INTERFEROMETER AND MEASUREMENT METHOD
- 专利标题(中): 发言人表示感谢
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申请号: EP16001456.9申请日: 2016-06-29
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公开(公告)号: EP3118571A1公开(公告)日: 2017-01-18
- 发明人: KAWASAKI, Kazuhiko , MATSUURA, Shinpei
- 申请人: Mitutoyo Corporation
- 申请人地址: 20-1, Sakado 1-chome Takatsu-ku Kawasaki-shi, Kanagawa 213-8533 JP
- 专利权人: Mitutoyo Corporation
- 当前专利权人: Mitutoyo Corporation
- 当前专利权人地址: 20-1, Sakado 1-chome Takatsu-ku Kawasaki-shi, Kanagawa 213-8533 JP
- 代理机构: Müller-Boré & Partner Patentanwälte PartG mbB
- 优先权: JP2015140397 20150714
- 主分类号: G01B9/02
- IPC分类号: G01B9/02 ; G01B11/24
摘要:
An instantaneous phase-shift interferometer uses a light source having a coherence length shorter than a difference in optical path length between the light reflected from a reference surface and the light reflected from a measured surface. A beam from the light source is split and, using an adjustable delay optical path, a first beam is delayed to cause a difference in optical path length and is superimposed on the same optical axis as a second beam, after which the reference beam and the measurement beam are generated. The optical path length of the delay optical path is changed during adjustment, a plurality of interference fringe images are individually captured, and at least one of a bias, amplitude, and phase shift amount of the interference fringes obtained in each of the interference fringe images is calculated. A shape of a measured object is measured based on bias calculation results, amplitude calculation results, and phase shift amount calculation results.
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