公开(公告)号：EP3118571B1

公开(公告)日：2019-05-22

申请号：EP16001456.9

申请日：2016-06-29

申请人： Mitutoyo Corporation

发明人： KAWASAKI, Kazuhiko ,  MATSUURA, Shinpei

IPC分类号： G01B9/02 ,  G01B11/24

公开(公告)号：EP3118571A1

公开(公告)日：2017-01-18

申请号：EP16001456.9

申请日：2016-06-29

申请人： Mitutoyo Corporation

发明人： KAWASAKI, Kazuhiko ,  MATSUURA, Shinpei

IPC分类号： G01B9/02 ,  G01B11/24

CPC分类号： G01B9/0201 ,  G01B9/02 ,  G01B9/02027 ,  G01B11/24 ,  G01B11/2441 ,  G01B2290/70

摘要： An instantaneous phase-shift interferometer uses a light source having a coherence length shorter than a difference in optical path length between the light reflected from a reference surface and the light reflected from a measured surface. A beam from the light source is split and, using an adjustable delay optical path, a first beam is delayed to cause a difference in optical path length and is superimposed on the same optical axis as a second beam, after which the reference beam and the measurement beam are generated. The optical path length of the delay optical path is changed during adjustment, a plurality of interference fringe images are individually captured, and at least one of a bias, amplitude, and phase shift amount of the interference fringes obtained in each of the interference fringe images is calculated. A shape of a measured object is measured based on bias calculation results, amplitude calculation results, and phase shift amount calculation results.

摘要翻译： 瞬时相移干涉仪使用相干长度短于从参考表面反射的光与从测量表面反射的光之间的光程长度差的光源。 来自光源的光束被分离，并且使用可调节的延迟光路，第一光束被延迟以引起光路长度的差异并且叠加在与第二光束相同的光轴上，之后参考光束和 产生测量光束。 在调整期间改变延迟光路的光路长度，分别捕获多个干涉条纹图像，并且在每个干涉条纹图像中获得的干涉条纹的偏移，幅度和相移量中的至少一个 被计算。 基于偏差计算结果，振幅计算结果和相移量计算结果测量测量对象的形状。