发明公开
EP3133554A1 NOVEL ACQUISITION AND PROCESSING OF DATA IN A TOMOGRAPHIC IMAGING APPARATUS
审中-公开
EERER TOMOGRAFISCHEN ABBILDUNGSVORRICHTUNG的NEUARTIGE ERFASSUNG VERARBEITUNG VON DATEN
- 专利标题： NOVEL ACQUISITION AND PROCESSING OF DATA IN A TOMOGRAPHIC IMAGING APPARATUS
- 专利标题（中）： EERER TOMOGRAFISCHEN ABBILDUNGSVORRICHTUNG的NEUARTIGE ERFASSUNG VERARBEITUNG VON DATEN
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申请号： EP15181202.1申请日： 2015-08-17
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公开(公告)号： EP3133554A1公开(公告)日： 2017-02-22
- 发明人: Kingston, Andrew , Latham, Shane , Sheppard, Adrian , Myers, Glenn , Recur, Benoit , Li, Heyang , Varslot, Trond
- 申请人： FEI Company
- 申请人地址： 5350 NE Dawson Creek Drive Hillsboro, OR 97124-5793 US
- 专利权人： FEI Company
- 当前专利权人： FEI Company
- 当前专利权人地址： 5350 NE Dawson Creek Drive Hillsboro, OR 97124-5793 US
- 代理机构： Bakker, Hendrik
- 主分类号： G06T11/00
- IPC分类号： G06T11/00
摘要：
A method of investigating a specimen using a tomographic imaging apparatus comprising:
- A specimen holder, for holding the specimen;
- A source, for producing a beam of radiation that can be directed at the specimen;
- A detector, for detecting a flux of radiation transmitted through the specimen from the source;
- A stage apparatus, for producing relative motion of the source with respect to the specimen, so as to allow the source and detector to image the specimen along a series of different viewing axes;
- A processing apparatus, for assembling output from the detector into a tomographic image of at least part of the specimen,
which method comprises the following steps:
- Considering a virtual reference surface that surrounds the specimen and is substantially centered thereon;
- Considering an incoming point of intersection of each of said viewing axes with this reference surface, thereby generating a set of such intersection points corresponding to said series of viewing axes;
- Choosing discrete viewing axes in said series so as to cause said set to comprise a two-dimensional lattice of points located areally on said reference surface in a substantially uniform distribution.
- A specimen holder, for holding the specimen;
- A source, for producing a beam of radiation that can be directed at the specimen;
- A detector, for detecting a flux of radiation transmitted through the specimen from the source;
- A stage apparatus, for producing relative motion of the source with respect to the specimen, so as to allow the source and detector to image the specimen along a series of different viewing axes;
- A processing apparatus, for assembling output from the detector into a tomographic image of at least part of the specimen,
which method comprises the following steps:
- Considering a virtual reference surface that surrounds the specimen and is substantially centered thereon;
- Considering an incoming point of intersection of each of said viewing axes with this reference surface, thereby generating a set of such intersection points corresponding to said series of viewing axes;
- Choosing discrete viewing axes in said series so as to cause said set to comprise a two-dimensional lattice of points located areally on said reference surface in a substantially uniform distribution.
信息查询
IPC分类:
| G | 物理 |
| G06 | 计算；推算或计数 |
| G06T | 一般的图像数据处理或产生 |
| G06T11/00 | 2D〔二维〕图像的生成 |
