公开(公告)号：EP4024040A1

公开(公告)日：2022-07-06

申请号：EP21214237.6

申请日：2021-12-14

申请人： FEI Company

发明人： Shánel, Ondrej ,  Schneider, Martin ,  Varslot, Trond ,  Kuijper, Maarten ,  Baco, Ondrej ,  Batelka, Václav

IPC分类号： G01N23/2251 ,  G21K1/04

摘要： Apertures (108) having references edges are situated to define a sample irradiation zone (131) and a shielded zone. The sample irradiation zone (131) includes a portion proximate the shielded zone that is conjugate to a detector (116). A sample (112) is scanned into the sample irradiation zone (131) from the shielded zone so that the sample (112) can remain unexposed until situated properly with respect to the detector (116) for imaging. Irradiation exposure of the sample (112) is reduced, permitting superior imaging and less damage to the sample (112). The sample can be translated longitudinally and rotated and an electron beam (104) can be used in order to form images by electron beam tomography.

公开(公告)号：EP4206664A1

公开(公告)日：2023-07-05

申请号：EP22216114.3

申请日：2022-12-22

申请人： FEI Company

发明人： Voigt, Andreas ,  Varslot, Trond ,  Zaoralová, Magda

IPC分类号： G01N23/046 ,  G01N23/225 ,  H01J37/00

摘要： The present invention relates to a method for acquiring tomographic images of a sample in a microscopy system, wherein the sample comprises a defined region, and wherein the method comprises determining a location in three-dimensional space of the defined region, wherein the method further comprises capturing an image of at least a part of the sample, and wherein the determination of the location in three-dimensional space of the defined region is based, at least in part, on the image of the part of the sample. The present invention also relates to a corresponding microscopy system and a computer program product to perform the method according to the present invention.

公开(公告)号：EP4053561A1

公开(公告)日：2022-09-07

申请号：EP22159134.0

申请日：2022-02-28

申请人： FEI Company

发明人： Schoenmakers, Remco ,  Van Willigen, Bert ,  Perquin, Reinier ,  Kramer, Pepijn ,  Algra, Egbert ,  McCormack, Jamie ,  Varslot, Trond ,  Caglar, Faruk

IPC分类号： G01N35/00

摘要： Systems and methods for using smart sample containers to manage complex sample evaluation workflows, are disclosed. An example method for using a smart sample container configured to manage a sample evaluation workflow according to the present invention comprises, obtaining a sample evaluation workflow for the one or more samples, receiving interactions with external devices, and based on the sample evaluation workflow, and causing the external devices to perform actions to advance the sample evaluation workflow. The smart sample container may further modify the sample evaluation workflow based on results of actions performed by the sample evaluation workflow and/or store information relating to the results of such actions. In this way, the smart sample containers are able to dynamically drive the evaluation of a sample through its sample evaluation workflow.

公开(公告)号：EP3133554A1

公开(公告)日：2017-02-22

申请号：EP15181202.1

申请日：2015-08-17

申请人： FEI Company

发明人： Kingston, Andrew ,  Latham, Shane ,  Sheppard, Adrian ,  Myers, Glenn ,  Recur, Benoit ,  Li, Heyang ,  Varslot, Trond

IPC分类号： G06T11/00

CPC分类号： G01T1/2985 ,  G01N23/046 ,  G01N23/2204 ,  G06T11/005 ,  G06T2211/436 ,  H01J37/222 ,  H01J2237/2807

摘要： A method of investigating a specimen using a tomographic imaging apparatus comprising:
- A specimen holder, for holding the specimen;
- A source, for producing a beam of radiation that can be directed at the specimen;
- A detector, for detecting a flux of radiation transmitted through the specimen from the source;
- A stage apparatus, for producing relative motion of the source with respect to the specimen, so as to allow the source and detector to image the specimen along a series of different viewing axes;
- A processing apparatus, for assembling output from the detector into a tomographic image of at least part of the specimen,

which method comprises the following steps:
- Considering a virtual reference surface that surrounds the specimen and is substantially centered thereon;
- Considering an incoming point of intersection of each of said viewing axes with this reference surface, thereby generating a set of such intersection points corresponding to said series of viewing axes;
- Choosing discrete viewing axes in said series so as to cause said set to comprise a two-dimensional lattice of points located areally on said reference surface in a substantially uniform distribution.

摘要翻译： 一种使用断层图像成像装置检查样本的方法，包括： - 用于保持所述样本的样本保持器; - 用于产生可以指向样品的辐射束的来源; - 检测器，用于检测通过来自源的试样的辐射通量; - 用于相对于样本产生源的相对运动的舞台装置，以便允许源和检测器沿着一系列不同的观察轴对样本进行成像; - 一种用于将检测器的输出组装成至少部分样本的断层图像的处理装置，该方法包括以下步骤： - 考虑围绕试样并基本上位于其上的虚拟参考表面; - 考虑每个所述观察轴的入射点与该参考表面，从而生成与所述一系列观察轴对应的一组这样的交点; - 选择所述系列中的离散观察轴，以便使所述组包括位于基本上均匀分布的所述参考表面上的点的二维点阵。