发明公开
- 专利标题： A PELLICLE FOR EUV
- 专利标题（中）： 一个EUV的PELLICLE
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申请号： EP16192598.7申请日： 2016-10-06
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公开(公告)号： EP3159739A3公开(公告)日： 2017-05-17
- 发明人: HORIKOSHI, Jun
- 申请人： Shin-Etsu Chemical Co., Ltd.
- 申请人地址： 6-1, Ohtemachi 2-chome, Chiyoda-ku Tokyo JP
- 专利权人： Shin-Etsu Chemical Co., Ltd.
- 当前专利权人： Shin-Etsu Chemical Co., Ltd.
- 当前专利权人地址： 6-1, Ohtemachi 2-chome, Chiyoda-ku Tokyo JP
- 代理机构： Cabinet Armengaud Aîné
- 优先权： JP2015205215 20151019
- 主分类号： G03F1/64
- IPC分类号： G03F1/64
摘要：
A pellicle is proposed in which an adhesive layer which adheres a pellicle film to a pellicle frame is mixed (filled) with powder of thermally conductive material such as metallic compound so that the heat generated by the strong EUV ray is quickly passed to the pellicle frame from the pellicle film lest the latter is deformed by the heat.
公开/授权文献
- EP3159739B1 A PELLICLE FOR EUV 公开/授权日：2020-08-12
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