发明公开
- 专利标题: ELECTRON ENERGY LOSS SPECTROMETER
- 专利标题(中): 电子能量损失谱仪
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申请号: EP15734022.5申请日: 2015-06-25
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公开(公告)号: EP3161851A2公开(公告)日: 2017-05-03
- 发明人: GUBBENS, Alexander, Jozef , TREVOR, Colin , TWESTEN, Ray, Dudley , BARFELS, Melanie
- 申请人: Gatan, Inc.
- 申请人地址: 780 Commonwealth Drive Warrendale, PA 15086 US
- 专利权人: Gatan, Inc.
- 当前专利权人: Gatan, Inc.
- 当前专利权人地址: 780 Commonwealth Drive Warrendale, PA 15086 US
- 代理机构: Zacco Denmark A/S
- 优先权: US201462018294P 20140627; US201562160381P 20150512
- 国际公布: WO2015200649 20151230
- 主分类号: H01J37/05
- IPC分类号: H01J37/05 ; H01J37/244 ; H01J37/28
摘要:
An electron energy loss spectrometer for electron microscopy is disclosed having an electrically isolated drift tube extending through the bending magnet and through subsequent optics that focus and magnify the spectrum. An electrostatic or magnetic lens is located either before or after or both before and after the drift tube and the lens or lenses are adjusted as a function of the bending magnet drift tube voltage to maintain a constant net focal length and to avoid defocusing. An energy selecting slit is included in certain embodiments to cleanly cut off electrons dispersed outside the energy range incident on the detector, thereby eliminating artifacts caused by unwanted electrons scattering back into the spectrum.
公开/授权文献
- EP3161851B1 ELECTRON ENERGY LOSS SPECTROMETER 公开/授权日:2018-08-15
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