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    AUTOMATED ADJUSTMENT OF AN ENERGY FILTERING TRANSMISSIION ELECTRON MICROSCOPE
    2.
    发明公开
    AUTOMATED ADJUSTMENT OF AN ENERGY FILTERING TRANSMISSIION ELECTRON MICROSCOPE 失效
    ENERGIEFILTRIERENDEN透射型电子显微镜的自动调整

    公开(公告)号：EP0917725A1

    公开(公告)日：1999-05-26

    申请号：EP97936047.0

    申请日：1997-07-10

    申请人： Gatan, Inc.

    发明人： KUNDMANN, Michael, Karl ,  GUBBENS, Alexander, Jozef ,  FRIEDMAN, Stuart, Lawrence ,  KRIVANEK, Ondrej, L.

    IPC分类号： G01Q20 ,  G01Q30 ,  H01J37

    CPC分类号： H01J37/05 ,  H01J37/252 ,  H01J37/26 ,  H01J37/265 ,  H01J2237/24485 ,  H01J2237/24585 ,  H01J2237/2826

    摘要： An energy filtering system of an EFTEM is automatically adjusted using a computer. The computer inserts an energy-selecting slit into the beam path and begins monitoring the position of the electron beam through a combination of the current sensors integral to the slit and the readout of an electron camera. The beam is centered within the slit by adjusting an energy dispersing element while monitoring beam sensors. After initial alignment, the slit is retracted and a reference aperture is inserted at the entrance to the energy filter. The electron camera captures an image of the reference aperture and the computer analyzes the deviations of the aperture image from its known physical dimensions in order to evaluate the electron optical distortions and aberrations of the filter. The computer uses the determined optical parameters to adjust the distortion and aberration correcting optical elements of the filter, whose effects are known due to previous calibration. After correcting the imaging aberrations, the reference aperture is withdrawn, the slit reinserted, and an isochromatic surface of the filter at the plane of the slit is measured by scanning the beam across a slit edge while integrating the transmitted beam intensity on the electron camera. The isochromatic surface thus collected by the electron camera is analyzed by the computer to extract additional aberration coefficients of the filter system. These measured aberration coefficients are used to make calibrated corrections to the filter optics.

    ELECTRON ENERGY LOSS SPECTROMETER
    4.
    发明公开
    ELECTRON ENERGY LOSS SPECTROMETER 审中-公开
    电子能量损失谱仪

    公开(公告)号：EP3161851A2

    公开(公告)日：2017-05-03

    申请号：EP15734022.5

    申请日：2015-06-25

    申请人： Gatan, Inc.

    发明人： GUBBENS, Alexander, Jozef ,  TREVOR, Colin ,  TWESTEN, Ray, Dudley ,  BARFELS, Melanie

    IPC分类号： H01J37/05 ,  H01J37/244 ,  H01J37/28

    CPC分类号： H01J37/05 ,  H01J37/12 ,  H01J37/147 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/053 ,  H01J2237/055 ,  H01J2237/057 ,  H01J2237/12 ,  H01J2237/24485 ,  H01J2237/2802

    摘要： An electron energy loss spectrometer for electron microscopy is disclosed having an electrically isolated drift tube extending through the bending magnet and through subsequent optics that focus and magnify the spectrum. An electrostatic or magnetic lens is located either before or after or both before and after the drift tube and the lens or lenses are adjusted as a function of the bending magnet drift tube voltage to maintain a constant net focal length and to avoid defocusing. An energy selecting slit is included in certain embodiments to cleanly cut off electrons dispersed outside the energy range incident on the detector, thereby eliminating artifacts caused by unwanted electrons scattering back into the spectrum.

    摘要翻译： 公开了一种用于电子显微镜的电子能量损失谱仪，该电子能量损失谱仪具有电绝缘漂移管，该绝缘漂移管延伸穿过弯曲磁体并穿过后续的聚焦并放大光谱的光学器件。 根据弯曲磁体漂移管电压调整漂移管和透镜或多个透镜之前或之后或之前和之后的静电或磁性透镜，以保持恒定净焦距并避免散焦。 在某些实施例中包括能量选择狭缝以清洁地截断分散在入射到检测器上的能量范围之外的电子，由此消除由散射回到光谱中的不需要的电子引起的伪影。