发明公开
- 专利标题： DESTRUCTIVE EXAMINATION METHOD AND QUALITY ASSESSMENT METHOD FOR QUARTZ GLASS CRUCIBLE
- 专利标题（中）： 石英玻璃坩埚破坏性检测方法及质量评价方法
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申请号： EP15844371.3申请日： 2015-09-24
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公开(公告)号： EP3199669A1公开(公告)日： 2017-08-02
- 发明人: KITAHARA Ken , SATO Tadahiro , SUDO Toshiaki , KITAHARA Eriko , WATANABE Takashi
- 申请人： SUMCO Corporation
- 申请人地址： 2-1, Shibaura 1-chome Minato-ku Tokyo 105-8634 JP
- 专利权人： SUMCO Corporation
- 当前专利权人： SUMCO Corporation
- 当前专利权人地址： 2-1, Shibaura 1-chome Minato-ku Tokyo 105-8634 JP
- 代理机构： Gulde & Partner
- 优先权： JP2014192923 20140922
- 国际公布： WO2016047694 20160331
- 主分类号： C30B29/06
- IPC分类号： C30B29/06 ; C30B15/10
摘要：
Provided is a destructive inspection method and a quality determination method of vitreous silica crucible capable of inspecting in a condition as close as possible to the actual status of use.
The destructive inspection method of the vitreous silica crucible according to the present disclosure, evaluates a crack state of an inner surface of a vitreous silica crucible 1 for pulling a silicon single crystal supported by a graphite susceptor 2 when a load is instantaneously applied to one point on the inner surface via an automatic center punch 10 while pushing the tip portion of the automatic center punch 10 against the inner surface.
The destructive inspection method of the vitreous silica crucible according to the present disclosure, evaluates a crack state of an inner surface of a vitreous silica crucible 1 for pulling a silicon single crystal supported by a graphite susceptor 2 when a load is instantaneously applied to one point on the inner surface via an automatic center punch 10 while pushing the tip portion of the automatic center punch 10 against the inner surface.
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