公开(公告)号：EP3018236B1

公开(公告)日：2018-08-08

申请号：EP13888681.7

申请日：2013-06-30

申请人： SUMCO Corporation

发明人： SUDO Toshiaki ,  SATO Tadahiro ,  KITAHARA Ken ,  KITAHARA Eriko

IPC分类号： C30B15/10 ,  C30B29/06 ,  C03B19/09

CPC分类号： C30B29/06 ,  C03B19/095 ,  C30B15/10 ,  Y02P40/57

摘要： A vitreous silica crucible, comprising a substantially cylindrical straight body portion having an opening on top end and extending in a vertical direction, a curved bottom portion, and a corner portion connecting the straight body portion with the bottom portion and a curvature of which is larger than that of the bottom portion, wherein, an inner surface of the crucible has a concavo-convex structure in which a groove-shaped valley is interposed between ridges, and an average interval of the ridges is 5 - 100 µm.

公开(公告)号：EP3015574A1

公开(公告)日：2016-05-04

申请号：EP13887931.7

申请日：2013-06-29

申请人： Sumco Corporation

发明人： SUDO Toshiaki ,  SATO Tadahiro ,  KITAHARA Ken ,  KITAHARA Eriko

IPC分类号： C30B15/10 ,  C30B29/06

CPC分类号： C30B15/10 ,  C30B29/06

摘要： A pulling-up method of silicon single crystal comprises a process of laying a molded body between a susceptor's inner surface and a crucible's outer surface. The molded body is formed based on three-dimensional data of inner surface shape of the susceptor which can hold the vitreous silica crucible and three-dimensional data of the crucible so as to make the susceptor's central axis and the crucible's central axis substantially aligned when it is laid between the susceptor's inner surface and the crucible's outer surface.

摘要翻译： 硅单晶的提拉方法包括在基座的内表面和坩埚的外表面之间铺设成型体的工艺。 模制体是基于能够容纳玻璃状石英坩埚的基座的内表面形状和坩埚的三维数据的三维数据形成的，以便使得基座的中心轴和坩埚的中心轴基本对准 被放置在基座的内表面和坩埚的外表面之间。

公开(公告)号：EP3088572B1

公开(公告)日：2019-05-15

申请号：EP14873978.2

申请日：2014-12-25

申请人： SUMCO Corporation

发明人： SUDO Toshiaki ,  SATO Tadahiro ,  KITAHARA Ken ,  KITAHARA Eriko

IPC分类号： C30B15/10 ,  C03B19/09 ,  C30B35/00 ,  C30B29/06

公开(公告)号：EP3199668A1

公开(公告)日：2017-08-02

申请号：EP15844603.9

申请日：2015-09-24

申请人： SUMCO Corporation

发明人： SATO Tadahiro ,  KITAHARA Eriko ,  SUDO Toshiaki ,  KITAHARA Ken

IPC分类号： C30B15/00 ,  C30B29/06

CPC分类号： C30B15/10 ,  C30B15/00 ,  C30B15/20 ,  C30B29/06 ,  C30B35/007

摘要： The capacity of respective vitreous silica crucible is grasped precisely to predict the initial liquid surface level of the silicon melt in the vitreous silica crucible. Thereby the dipping process of the seed crystal is reliably performed.
Spatial coordinates of multiple points on an inner surface of the vitreous silica crucible prior to filling raw material in the vitreous silica crucible, and a three-dimensional shape of the inner surface of the vitreous silica crucible from a combination of polygons having each measurement point as a vertex coordinate is specified (S11); a predictive value of an initial liquid surface level of the silicon melt in the vitreous silica crucible is preset (S12); a volume of the silicon melt satisfying the predictive value of the initial liquid surface level is obtained based on the three-dimensional shape of the inner surface of the vitreous silica crucible (S13); a weight of the silicon melt having the volume is obtained (S14); raw material having the weight is filled in the vitreous silica crucible (S15); a dipping control of the seed crystal is performed based on the predictive value of the initial liquid surface level (S17).

摘要翻译： 为了预测氧化硅玻璃坩埚中的硅熔体的初始液面高度，准确把握各氧化硅玻璃坩埚的容量。 由此可靠地进行晶种的浸渍处理。 将原料填充到氧化硅玻璃坩埚中之前的氧化硅玻璃坩埚的内表面上的多个点的空间坐标和氧化硅玻璃坩埚的内表面的三维形状由具有各个测量点的多边形的组合 指定顶点坐标（S11）; 预先设定硅玻璃坩埚内的硅熔液的初始液面水平的预测值（S12）。 基于氧化硅玻璃坩埚的内表面的三维形状来获得满足初始液面水平的预测值的硅熔体的体积（S13）; 获得具有体积的硅熔体的重量（S14）; 在氧化硅玻璃坩埚中填充具有重量的原料（S15）。 基于初始液面水平的预测值执行晶种的浸入控制（S17）。

公开(公告)号：EP3018236A1

公开(公告)日：2016-05-11

申请号：EP13888681.7

申请日：2013-06-30

申请人： SUMCO Corporation

发明人： SUDO Toshiaki ,  SATO Tadahiro ,  KITAHARA Ken ,  KITAHARA Eriko

IPC分类号： C30B15/10 ,  C30B29/06

CPC分类号： C30B29/06 ,  C03B19/095 ,  C30B15/10 ,  Y02P40/57

摘要： A vitreous silica crucible, comprising a substantially cylindrical straight body portion having an opening on top end and extending in a vertical direction, a curved bottom portion, and a corner portion connecting the straight body portion with the bottom portion and a curvature of which is larger than that of the bottom portion, wherein, an inner surface of the crucible has a concavo-convex structure in which a groove-shaped valley is interposed between ridges, and an average interval of the ridges is 5 - 100 µm.

公开(公告)号：EP3088573B1

公开(公告)日：2020-07-15

申请号：EP14874952.6

申请日：2014-12-25

申请人： SUMCO Corporation

发明人： SUDO Toshiaki ,  SATO Tadahiro ,  KITAHARA Ken ,  KITAHARA Eriko

IPC分类号： C30B29/06 ,  C03B20/00 ,  C30B15/10 ,  G01N21/23 ,  C03C3/04 ,  G01L1/24 ,  G01L5/00 ,  H04N5/232

公开(公告)号：EP3199668B1

公开(公告)日：2019-07-17

申请号：EP15844603.9

申请日：2015-09-24

申请人： SUMCO Corporation

发明人： SATO Tadahiro ,  KITAHARA Eriko ,  SUDO Toshiaki ,  KITAHARA Ken

IPC分类号： C30B15/00 ,  C30B29/06 ,  C30B35/00 ,  C30B15/10 ,  C30B15/20

公开(公告)号：EP3199669B1

公开(公告)日：2018-09-19

申请号：EP15844371.3

申请日：2015-09-24

申请人： SUMCO Corporation

发明人： KITAHARA Ken ,  SATO Tadahiro ,  SUDO Toshiaki ,  KITAHARA Eriko ,  WATANABE Takashi

IPC分类号： C30B15/10 ,  C30B35/00 ,  G01N3/307 ,  C30B29/06 ,  C03B19/09

CPC分类号： G01N3/307 ,  C03B19/095 ,  C30B15/10 ,  C30B29/06 ,  C30B35/002 ,  G01N2203/001 ,  G01N2203/0035 ,  G01N2203/0064

摘要： Provided is a destructive inspection method and a quality determination method of vitreous silica crucible capable of inspecting in a condition as close as possible to the actual status of use. The destructive inspection method of the vitreous silica crucible according to the present disclosure, evaluates a crack state of an inner surface of a vitreous silica crucible 1 for pulling a silicon single crystal supported by a graphite susceptor 2 when a load is instantaneously applied to one point on the inner surface via an automatic center punch 10 while pushing the tip portion of the automatic center punch 10 against the inner surface.

公开(公告)号：EP3015574B1

公开(公告)日：2018-03-21

申请号：EP13887931.7

申请日：2013-06-29

申请人： Sumco Corporation

发明人： SUDO Toshiaki ,  SATO Tadahiro ,  KITAHARA Ken ,  KITAHARA Eriko

IPC分类号： C30B15/10 ,  C30B29/06

CPC分类号： C30B15/10 ,  C30B29/06

摘要： A pulling-up method of silicon single crystal comprises a process of laying a molded body between a susceptor's inner surface and a crucible's outer surface. The molded body is formed based on three-dimensional data of inner surface shape of the susceptor which can hold the vitreous silica crucible and three-dimensional data of the crucible so as to make the susceptor's central axis and the crucible's central axis substantially aligned when it is laid between the susceptor's inner surface and the crucible's outer surface.

公开(公告)号：EP3199669A1

公开(公告)日：2017-08-02

申请号：EP15844371.3

申请日：2015-09-24

申请人： SUMCO Corporation

发明人： KITAHARA Ken ,  SATO Tadahiro ,  SUDO Toshiaki ,  KITAHARA Eriko ,  WATANABE Takashi

IPC分类号： C30B29/06 ,  C30B15/10

CPC分类号： G01N3/307 ,  C03B19/095 ,  C30B15/10 ,  C30B29/06 ,  C30B35/002 ,  G01N2203/001 ,  G01N2203/0035 ,  G01N2203/0064

摘要： Provided is a destructive inspection method and a quality determination method of vitreous silica crucible capable of inspecting in a condition as close as possible to the actual status of use.
The destructive inspection method of the vitreous silica crucible according to the present disclosure, evaluates a crack state of an inner surface of a vitreous silica crucible 1 for pulling a silicon single crystal supported by a graphite susceptor 2 when a load is instantaneously applied to one point on the inner surface via an automatic center punch 10 while pushing the tip portion of the automatic center punch 10 against the inner surface.

摘要翻译： 提供了一种能够在尽可能接近实际使用状态的条件下进行检查的氧化硅玻璃坩埚的破坏性检查方法和质量确定方法。 根据本公开的氧化硅玻璃坩埚的破坏性检查方法评估当负载瞬时施加到石墨基座2的一点时用于拉拽由石墨基座2支撑的硅单晶的氧化硅玻璃坩埚1的内表面的开裂状态 同时通过自动中心冲头10在内表面上推动自动中心冲头10的尖端部分抵靠内表面。