发明公开
- 专利标题: DESTRUCTIVE EXAMINATION METHOD AND QUALITY ASSESSMENT METHOD FOR QUARTZ GLASS CRUCIBLE
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申请号: EP15844371申请日: 2015-09-24
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公开(公告)号: EP3199669A4公开(公告)日: 2018-03-07
- 发明人: KITAHARA KEN , SATO TADAHIRO , SUDO TOSHIAKI , KITAHARA ERIKO , WATANABE TAKASHI
- 申请人: SUMCO CORP
- 专利权人: SUMCO CORP
- 当前专利权人: SUMCO CORP
- 优先权: JP2014192923 2014-09-22
- 主分类号: C30B15/10
- IPC分类号: C30B15/10 ; C03B19/09 ; C30B29/06 ; C30B35/00 ; G01N3/307
摘要:
Provided is a destructive inspection method and a quality determination method of vitreous silica crucible capable of inspecting in a condition as close as possible to the actual status of use. The destructive inspection method of the vitreous silica crucible according to the present disclosure, evaluates a crack state of an inner surface of a vitreous silica crucible 1 for pulling a silicon single crystal supported by a graphite susceptor 2 when a load is instantaneously applied to one point on the inner surface via an automatic center punch 10 while pushing the tip portion of the automatic center punch 10 against the inner surface.
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