Invention Publication
- Patent Title: SENSOR SYSTEM AND DEVICE
- Patent Title (中): 传感器系统和装置
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Application No.: EP15876971.1Application Date: 2015-12-02
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Publication No.: EP3244200A1Publication Date: 2017-11-15
- Inventor: ONO Kazuo , USAGAWA Toshiyuki
- Applicant: Hitachi Automotive Systems, Ltd.
- Applicant Address: 2520, Takaba Hitachinaka-shi Ibaraki 312-8503 JP
- Assignee: Hitachi Automotive Systems, Ltd.
- Current Assignee: Hitachi Automotive Systems, Ltd.
- Current Assignee Address: 2520, Takaba Hitachinaka-shi Ibaraki 312-8503 JP
- Agency: MERH-IP Matias Erny Reichl Hoffmann Patentanwälte PartG mbB
- Priority: JP2015003464 20150109
- International Announcement: WO2016111098 20160714
- Main IPC: G01N27/00
- IPC: G01N27/00 ; G01K7/01 ; H01L21/336 ; H01L21/761 ; H01L21/822 ; H01L21/8234 ; H01L27/04 ; H01L27/06 ; H01L27/08 ; H01L27/088 ; H01L29/78
Abstract:
The invention achieves a lower noise of a sense signal of a FET-type hydrogen sensor.
For solving the above problem, one aspect of a sensor system of the invention includes a reference device and a sensor device configured using FETs on a substrate, and further, well potentials of the reference device and the sensor device are electrically isolated from each other.
For solving the above problem, one aspect of a sensor system of the invention includes a reference device and a sensor device configured using FETs on a substrate, and further, well potentials of the reference device and the sensor device are electrically isolated from each other.
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