发明公开
- 专利标题: OPTICAL MODULATOR AND METHOD OF MANUFACTURING SAME
- 专利标题(中): 光调制器及其制造方法
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申请号: EP16746603.6申请日: 2016-02-02
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公开(公告)号: EP3255480A1公开(公告)日: 2017-12-13
- 发明人: FUJIKATA, Junichi , TAKAHASHI, Shigeki , TAKENAKA, Mitsuru , KIM, Younghyun
- 申请人: Photonics Electronics Technology Research Association , The University of Tokyo
- 申请人地址: 1-20-10 Sekiguchi Bunkyo-ku Tokyo 112-0014 JP
- 专利权人: Photonics Electronics Technology Research Association,The University of Tokyo
- 当前专利权人: Photonics Electronics Technology Research Association,The University of Tokyo
- 当前专利权人地址: 1-20-10 Sekiguchi Bunkyo-ku Tokyo 112-0014 JP
- 代理机构: Hoffmann Eitle
- 优先权: JP2015022351 20150206
- 国际公布: WO2016125772 20160811
- 主分类号: G02F1/015
- IPC分类号: G02F1/015 ; G02B6/12 ; G02B6/122 ; G02F1/025
摘要:
An optical phase modulator 100 according to an embodiment of this disclosure comprises a rib-type waveguide structure 110 comprising: a PN junction 106 comprising Si and formed in a lateral direction on a substrate; and a Si 1-x Ge x layer 108 that is doped with a p-type impurity and comprises at least one layer laminated on the PN junction 106, so as to be electrically connected to the PN junction 106.
公开/授权文献
- EP3255480B1 OPTICAL MODULATOR AND METHOD OF MANUFACTURING SAME 公开/授权日:2021-07-28
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