发明公开
EP3255480A1 OPTICAL MODULATOR AND METHOD OF MANUFACTURING SAME 审中-公开
光调制器及其制造方法

OPTICAL MODULATOR AND METHOD OF MANUFACTURING SAME
摘要:
An optical phase modulator 100 according to an embodiment of this disclosure comprises a rib-type waveguide structure 110 comprising: a PN junction 106 comprising Si and formed in a lateral direction on a substrate; and a Si 1-x Ge x layer 108 that is doped with a p-type impurity and comprises at least one layer laminated on the PN junction 106, so as to be electrically connected to the PN junction 106.
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