发明公开
EP3291292A1 MEMORY CELL, SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE, AND METHOD FOR MANUFACTURING SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
审中-公开
存储器单元,半导体集成电路装置及制造半导体集成电路装置的方法
- 专利标题: MEMORY CELL, SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE, AND METHOD FOR MANUFACTURING SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
- 专利标题(中): 存储器单元,半导体集成电路装置及制造半导体集成电路装置的方法
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申请号: EP16789528.3申请日: 2016-04-26
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公开(公告)号: EP3291292A1公开(公告)日: 2018-03-07
- 发明人: OWADA Fukuo , KAWASHIMA Yasuhiko , YOSHIDA Shinji , TANIGUCHI Yasuhiro , OKUYAMA Kosuke
- 申请人: Floadia Corporation
- 申请人地址: 30-9, Ogawahigashicho 1-chome Kodaira-shi, Tokyo 187-0031 JP
- 专利权人: Floadia Corporation
- 当前专利权人: Floadia Corporation
- 当前专利权人地址: 30-9, Ogawahigashicho 1-chome Kodaira-shi, Tokyo 187-0031 JP
- 代理机构: Bandpay & Greuter
- 优先权: JP2015094287 20150501
- 国际公布: WO2016178392 20161110
- 主分类号: H01L21/8247
- IPC分类号: H01L21/8247 ; H01L21/336 ; H01L27/10 ; H01L27/115 ; H01L29/788 ; H01L29/792
摘要:
A semiconductor integrated circuit device, and a method for manufacturing a semiconductor integrated circuit device are disclosed. A first select gate electrode (DG) and a second select gate electrode (SG) are sidewall-shaped along sidewalls of a memory gate structure (4). With this configuration, the memory gate structure (4) is not disposed on the first select gate electrode (DG) and the second select gate electrode (SG). Accordingly, the memory gate structure (4), the first select gate structure (5), and the second select gate structure (6) can have equal heights, thereby achieving reduction in size as compared to a conventional case. In addition, a silicide layer (S1) on the first select gate electrode (DG) and a silicide layer (S2) on the second select gate electrode (SG) can be separated farther from a memory gate electrode (MG) by the thickness of a cap film (CP1). Accordingly, the silicide layers (S1 and S2) on the first select gate electrode (DG) and the second select gate electrode (SG) are unlikely to contact with the memory gate electrode (MG), thereby preventing a short-circuit defect of the memory gate electrode (MG).
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