发明公开
EP3300111A1 MEMORY CELL, SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE, AND METHOD FOR MANUFACTURING SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
审中-公开
存储器单元,半导体集成电路装置及制造半导体集成电路装置的方法
- 专利标题: MEMORY CELL, SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE, AND METHOD FOR MANUFACTURING SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
- 专利标题(中): 存储器单元,半导体集成电路装置及制造半导体集成电路装置的方法
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申请号: EP16827814.1申请日: 2016-07-21
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公开(公告)号: EP3300111A1公开(公告)日: 2018-03-28
- 发明人: YOSHIDA Shoji , OWADA Fukuo , OKADA Daisuke , KAWASHIMA Yasuhiko , YOSHIDA Shinji , YANAGISAWA Kazumasa , TANIGUCHI Yasuhiro
- 申请人: Floadia Corporation
- 申请人地址: 30-9, Ogawahigashicho 1-chome Kodaira-shi, Tokyo 187-0031 JP
- 专利权人: Floadia Corporation
- 当前专利权人: Floadia Corporation
- 当前专利权人地址: 30-9, Ogawahigashicho 1-chome Kodaira-shi, Tokyo 187-0031 JP
- 代理机构: Bandpay & Greuter
- 优先权: JP2015146189 20150723
- 国际公布: WO2017014254 20170126
- 主分类号: H01L27/10
- IPC分类号: H01L27/10 ; H01L27/115 ; H01L29/788 ; H01L29/792
摘要:
A memory cell according to the present invention (1) includes a memory gate structure (2), a first select gate structure (3), and a second select gate structure (4). In the memory gate structure (2), a lower memory gate insulating film (10), a charge storage layer (EC), an upper memory gate insulating film (11), and a metal memory gate electrode (MG) are stacked in this order. The first select gate structure (3) includes a metal first select gate electrode (DG) along a first sidewall spacer (8a) provided on a sidewall of the memory gate structure (2). The second select gate structure (4) includes a metal second select gate electrode (SG) along a second sidewall spacer (8b) provided on another sidewall of the memory gate structure (2). With this configuration, the metal memory gate electrode (MG), the metal first select gate electrode (DG), and the metal second select gate electrode (SG) can be formed of a metallic material the same as that of a metal logic gate electrode (LG11). Thus, the memory cell can be formed through a series of manufacturing processes of forming the metal logic gate electrode (LG1) made of a metallic material on a semiconductor substrate.
公开/授权文献
- EP3300111B1 MEMORY CELL AND SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE 公开/授权日:2021-02-17
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