- 专利标题: ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE RESIN COMPOSITION, RESIST FILM, PATTERN FORMING METHOD, AND METHOD FOR PRODUCING ELECTRONIC DEVICE
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申请号: EP18774945.2申请日: 2018-02-23
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公开(公告)号: EP3605226A8公开(公告)日: 2020-04-01
- 发明人: SAKITA Kyohei , FUJITA Mitsuhiro , TANAKA Takumi , YAMAMOTO Keishi , GOTO Akiyoshi , KATO Keita
- 申请人: FUJIFILM Corporation
- 申请人地址: 26-30, Nishiazabu 2-chome Minato-ku Tokyo 106-8620 JP
- 专利权人: FUJIFILM Corporation
- 当前专利权人: FUJIFILM Corporation
- 当前专利权人地址: 26-30, Nishiazabu 2-chome Minato-ku Tokyo 106-8620 JP
- 代理机构: Hoffmann Eitle
- 优先权: JP2017071291 20170331
- 国际公布: WO2018180070 20181004
- 主分类号: G03F7/004
- IPC分类号: G03F7/004 ; G03F7/038 ; G03F7/039
摘要:
Provided is an actinic ray-sensitive or radiation-sensitive resin composition capable of forming a pattern having excellent pattern line width roughness (LWR) and critical dimension uniformity (CDU). In addition, provided are a resist film, a pattern forming method, and a method for manufacturing an electronic device, for which the actinic ray-sensitive or radiation-sensitive resin composition is used. The actinic ray-sensitive or radiation-sensitive resin composition contains a resin having an acid-decomposable group whose polarity increases through decomposition by the action of an acid, an acid generator A capable of generating a first acid upon irradiation with actinic rays or radiation, and an acid generator B capable of generating a second acid upon irradiation with actinic rays or radiation, and the first acid and the second acid satisfy predetermined requirements.
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