发明公开

CLEANING APPARATUS
摘要:
A compact cleaning apparatus including a robot with a narrow range of motion is provided. The cleaning apparatus (10) includes: a cleaning chamber (11); a cleaning station (15); a drying station (23); a separation wall (13); a single axis robot (44) including a column (46) arranged adjacent to a side surface (38), a linear guide (59) extending vertically, and a vertical moving saddle (77) movable vertically; an arm portion (45) including a first rotation saddle (93) rotatable about a second axis extending vertically, a first arm (101) swingable about a third axis (143) extending horizontally and extending orthogonal to the third axis (143), a second arm (113) rotatable about a fourth axis (145) orthogonal to the third axis (143), a second rotation saddle (129) rotatable about a fifth axis (147) orthogonal to the fourth axis (145), a third rotation saddle (136) rotatable about a sixth axis (149) orthogonal to the fifth axis (147); and a hand (137) for gripping a workpiece (151).
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