- 专利标题: RF POWER GENERATOR WITH ANALOGUE AND DIGITAL DETECTORS AND METHOD OF OPERATING SUCH A POWER GEBERATOR
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申请号: EP21182480.0申请日: 2019-09-10
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公开(公告)号: EP3907753A1公开(公告)日: 2021-11-10
- 发明人: Labanc, Anton , Gruner, Daniel , Grede, André
- 申请人: Comet AG
- 申请人地址: CH 3175 Flamatt Herrengasse 10
- 代理机构: dompatent von Kreisler Selting Werner - Partnerschaft von Patent- und Rechtsanwälten mbB
- 主分类号: H01J37/32
- IPC分类号: H01J37/32 ; H03F3/189
摘要:
In the field of RF generator design, some output power faults may occur so quickly that a digital control system is unable to effectively address them. Accordingly, there is provided a generator, comprising: a power amplifier, at least one sampler configured to sample a radio frequency, RF, signal at an output of the power amplifier, an RF output configured to output an RF signal from the generator, a signal generator configured to generate an RF input signal and to provide the RF input signal to the power amplifier, a controller comprising a digital control portion and an analogue control portion, wherein one or both of the digital control portion and the analogue control portion are configured to control at least the power amplifier and/or the signal generator, an analogue feedback path between the at least one sampler and the controller enabling an analogue signal representation of a signal from the at least one sampler to be provided to the controller, and a digital feedback path between the at least one sampler and the controller enabling a digital signal representation of the signal from the at least one sampler to be provided to the controller.
The controller is configured to adjust the RF signal at the RF output from a first state into a second state based on the analogue signal representation and/or the digital signal representation.
The controller is configured to adjust the RF signal at the RF output from a first state into a second state based on the analogue signal representation and/or the digital signal representation.
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