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1.发明公开
公开(公告)号：EP4242904A3
公开(公告)日：2023-11-01
申请号：EP23184108.1
申请日：2021-10-06
申请人： Comet AG
发明人： vor dem Brocke, Manuel , Schlierf, Roland , Grede, André , Gruner, Daniel , Schwerg, Nikolai , Labanc, Anton , Fink, Thomas
摘要： The invention relates to a method for machine learning a detection of at least one irregularity in a plasma system, particularly an RF powered plasma processing system, comprising:
- Providing at least one input signal (210) each related to an analog signal of a power delivery system (1) for the plasma system and/or to another characteristic of the power delivery system (1) and/or of the plasma system, the at least one input signal (210) having at least one irregularity feature indicative of the irregularity in the plasma system,
- Performing a machine learning procedure (310) wherein the at least one input signal (210) having the at least one irregularity feature is processed by a programmable circuit (10) to train the detection of the irregularity in the plasma system.-
公开(公告)号：EP4307338A1
公开(公告)日：2024-01-17
申请号：EP22184545.6
申请日：2022-07-12
申请人： Comet AG
发明人： Galos, Adam , Grede, André , Gruner, Daniel , Hartmann, Andreas , Labanc, Anton , Pankratz, Kai , Rüttgers, René , Sistemich, Roland
摘要： A Radio Frequency, RF, generator in particular for a plasma application, comprising: a cooling element; at least a first RF power stage having a first output and a second RF power stage having a second output, both being mounted onto the cooling element; an RF combining network mounted onto the cooling element comprising at least a first input and a second input; an RF distribution element, wherein the RF distribution element comprises a printed circuit board, PCB, having a plurality of conductors, wherein the conductors of the RF distribution element are arranged such that the first output of the first RF power stage is connected to the first input of the RF combining network and the second output of the second RF power stage with the second input of the RF combining network, respectively, wherein the PCB of the RF distribution element is arranged perpendicularly to the cooling element.
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3.发明公开
公开(公告)号：EP4113574A1
公开(公告)日：2023-01-04
申请号：EP21201090.4
申请日：2021-10-06
申请人： Comet AG
发明人： vor dem Brocke, Manuel , Schlierf, Roland , Grede, André , Gruner, Daniel , Schwerg, Nikolai , Labanc, Anton , Fink, Thomas
摘要： The invention relates to a method for machine learning a detection of at least one irregularity in a plasma system, particularly an RF powered plasma processing system, comprising:
- Providing at least one input signal (210) each related to an analog signal of a power delivery system (1) for the plasma system and/or to another characteristic of the power delivery system (1) and/or of the plasma system, the at least one input signal (210) having at least one irregularity feature indicative of the irregularity in the plasma system,
- Performing a machine learning procedure (310) wherein the at least one input signal (210) having the at least one irregularity feature is processed by a programmable circuit (10) to train the detection of the irregularity in the plasma system.-
公开(公告)号：EP4113352A1
公开(公告)日：2023-01-04
申请号：EP21183476.7
申请日：2021-07-02
申请人： Comet AG
发明人： Schwerg, Nikolai , Schlierf, Roland , Grede, André , Gruner, Daniel , Labanc, Anton , Fink, Thomas , vor dem Brocke, Manuel
摘要： The invention relates to a method for improving digital signal processing in a radio-frequency system (1), in particular a radio-frequency power delivery system (1), comprising:
- Providing (101) at least one input signal (210), preferably related to a radio-frequency signal of the radio-frequency system (1),
- Performing (102) a processing procedure (310) wherein the at least one input signal (210) is repeatedly processed by a programmable circuit (10) using at least one configurable parameter of the processing, wherein a configuration of the at least one parameter is varied for each processing of the at least one input signal (210) to obtain respective processing results (220),
- Determining (103) at least one parameter result (240) for an optimization of the configuration based on the processing results (220),
- Providing (104) the at least one determined parameter result for the improved digital signal processing.-
5.发明公开
公开(公告)号：EP3907753A1
公开(公告)日：2021-11-10
申请号：EP21182480.0
申请日：2019-09-10
申请人： Comet AG
发明人： Labanc, Anton , Gruner, Daniel , Grede, André
摘要： In the field of RF generator design, some output power faults may occur so quickly that a digital control system is unable to effectively address them. Accordingly, there is provided a generator, comprising: a power amplifier, at least one sampler configured to sample a radio frequency, RF, signal at an output of the power amplifier, an RF output configured to output an RF signal from the generator, a signal generator configured to generate an RF input signal and to provide the RF input signal to the power amplifier, a controller comprising a digital control portion and an analogue control portion, wherein one or both of the digital control portion and the analogue control portion are configured to control at least the power amplifier and/or the signal generator, an analogue feedback path between the at least one sampler and the controller enabling an analogue signal representation of a signal from the at least one sampler to be provided to the controller, and a digital feedback path between the at least one sampler and the controller enabling a digital signal representation of the signal from the at least one sampler to be provided to the controller.
The controller is configured to adjust the RF signal at the RF output from a first state into a second state based on the analogue signal representation and/or the digital signal representation.-
公开(公告)号：EP4369377A1
公开(公告)日：2024-05-15
申请号：EP22206909.8
申请日：2022-11-11
申请人： Comet AG
发明人： Dennler, Philippe , Grede, André , Gruner, Daniel , Guinnard, Cyril , Labanc, Anton , Sistemich, Roland , Vogel, Samuel
CPC分类号： H01J37/32174 , A61B18/1206
摘要： Radiofrequency, RF, generator, in particular for a plasma application, comprising: at least one cooling element having an upper surface and a lower surface; at least one DC power supply; at least one power stage to amplify an RF signal and connected to the upper surface of the at least one cooling element, wherein the power stage comprises one or more power amplifiers; a driver to supply the power amplifier of the at least one power stage and connected to the upper surface of the at least one cooling element; wherein the at least one DC power supply is connected by a busbar with the power amplifier and the driver, wherein a DC voltage Vbusbar is supplied to the power amplifier and the driver via the busbar; and wherein the busbar comprises a damping network comprising a plurality of capacitors connected between ground and the busbar and configured to shape transients on Vbusbar.
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公开(公告)号：EP4307323A1
公开(公告)日：2024-01-17
申请号：EP22184531.6
申请日：2022-07-12
申请人： Comet AG
发明人： Dennler, Philippe , Galos, Adam , Gruner, Daniel , Klanjsek, Janez , Labanc, Anton , Sistemich, Roland , Staub, Thomas
摘要： Resistor, in particular for a power combiner, comprising a resistor chip and a clamping element to clamp the resistor chip to a heat sink or heat spreader, wherein the clamping element has a clamping arm to apply a pressure to the resistor chip.
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公开(公告)号：EP3276827A1
公开(公告)日：2018-01-31
申请号：EP16181040.3
申请日：2016-07-25
申请人： Comet AG
发明人： Labanc, Anton , Gruner, Daniel , Reiff, Marcus
IPC分类号： H03H7/38
CPC分类号： H03F1/565 , H03F1/42 , H03F3/19 , H03F3/193 , H03F3/21 , H03F3/265 , H03F2200/36 , H03F2200/387 , H03F2200/451 , H03F2200/541 , H03H7/38
摘要： The invention describes broadband matching network (100) for coupling to an output of amplifying device (200) for amplifiers with a nominal operating frequency between 1 MHz and 100 MHz, more preferably between 5 MHz and 85 MHz and an output power of at least 100 W, more preferably at least 200 W and most preferably at least 250 W, and a wherein the broadband matching network (100) comprises a planar transformer (110) with a primary winding (112) arranged on a primary side of the broadband matching network (100) and a secondary winding (114) arranged on a secondary side of the broadband matching network (100), wherein the primary winding (112) is arranged to be electrically connected to the output of the amplifying device (200), wherein the broadband matching network (100) is characterized by a center frequency and a bandwidth with a frequency range of at least +/-3%, preferably at least +/-5%, more preferably at least +/-7% around the center frequency, wherein the center frequency corresponds to the nominal operating frequency, and wherein the broadband matching network (100) is arranged such that a series resonance frequency of the broadband matching network (100) corresponds to the center frequency, and a first parallel resonance frequency and a second parallel resonance frequency of the broadband matching circuit (100) are arranged around the series resonance frequency such that a frequency dependence of a load impedance provided by the broadband matching network (100) for the amplifying device (200) is reduced. The invention further describes an amplifier arrangement comprising the broadband matching network (100), an electrical RF generator comprising the RF amplifier arrangement and a plasma processing system comprising the electrical RF generator. The invention finally describes a method of implementing a broadband matching network for an amplifier arrangement.
摘要翻译： 本发明描述了宽带匹配网络（100），用于耦合到放大器的放大设备（200）的输出，该放大设备具有在1MHz和100MHz之间，更优选地在5MHz和85MHz之间的标称工作频率以及至少100MHz的输出功率 W，更优选地至少200W并且最优选地至少250W，并且其中宽带匹配网络（100）包括平面变压器（110），该平面变压器具有布置在宽带匹配网络的初级侧上的初级绕组 （100）和布置在所述宽带匹配网络（100）的次级侧上的次级绕组（114），其中所述初级绕组（112）被布置为电连接到所述放大装置（200）的输出，其中所述 宽带匹配网络（100）的特征在于中心频率和带宽，其频率范围在中心频率附近至少+/- 3％，优选至少+/- 5％，更优选至少+/- 7％ ，其中中心频率cor 并且其中宽带匹配网络（100）被布置为使得宽带匹配网络（100）的串联谐振频率对应于中心频率，并且第一并联谐振频率和第二并联谐振频率 所述宽带匹配电路（100）的所述放大器被布置在所述串联谐振频率周围，使得由所述宽带匹配网络（100）为所述放大装置（200）提供的负载阻抗的频率依赖性被降低。 本发明还描述了包括宽带匹配网络（100）的放大器装置，包括RF放大器装置的电气RF发生器以及包括电气RF发生器的等离子体处理系统。 本发明最后描述了一种为放大器装置实现宽带匹配网络的方法。
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9.发明公开
公开(公告)号：EP4242904A2
公开(公告)日：2023-09-13
申请号：EP23184108.1
申请日：2021-10-06
申请人： Comet AG
发明人： vor dem Brocke, Manuel , Schlierf, Roland , Grede, André , Gruner, Daniel , Schwerg, Nikolai , Labanc, Anton , Fink, Thomas
IPC分类号： G06F30/36
摘要： The invention relates to a method for machine learning a detection of at least one irregularity in a plasma system, particularly an RF powered plasma processing system, comprising:
- Providing at least one input signal (210) each related to an analog signal of a power delivery system (1) for the plasma system and/or to another characteristic of the power delivery system (1) and/or of the plasma system, the at least one input signal (210) having at least one irregularity feature indicative of the irregularity in the plasma system,
- Performing a machine learning procedure (310) wherein the at least one input signal (210) having the at least one irregularity feature is processed by a programmable circuit (10) to train the detection of the irregularity in the plasma system.-
10.发明公开
公开(公告)号：EP3952113A1
公开(公告)日：2022-02-09
申请号：EP20190074.3
申请日：2020-08-07
申请人： Comet AG
摘要： The invention describes a control unit (2, 21) for generating a plurality of synchronized radio frequency (RF) output signals (RF out,i ) each having a respective output frequency (f i ), phase (Φ i ), and amplitude (A i ), comprising:
a signal comparator (3) configured to compare a reference signal (4) having a reference frequency (f ref ) and a reference phase (Φ ref ) with a feedback signal (5) having a feedback frequency (f PLL ) and a feedback phase (Φ PLL ), and configured to generate an error signal (6, 6') representative of a difference between the reference signal (4) and the feedback signal (5); and
a data processing unit (7) receiving as an input signal the error signal (6, 6') generated by the signal comparator (3), and outputting a plurality of waveform tuning signals (FTW PLL , FTW i ) as a function of the error signal (6, 6');
wherein a plurality of waveform generators (DDS PLL , DDS i ) each receiving at least one of the plurality of waveform tuning signals (FTW PLL , FTW i ) output by the data processing unit (7), wherein each waveform generator (DDS PLL , DDS i ) generates a time-dependent amplitude signal (A PLL (t), A i (t)) as a function of the received respective waveform tuning signal (FTW PLL , FTW i ),
wherein one predetermined amplitude signal (A PLL (t)) of the generated plurality of amplitude signals (A PLL (t), A i (t)) represents the feedback signal (5) input to the signal comparator (3), and the other amplitude signals (A i (t)) represent the respective radio frequency (RF) output signals (RF out,i ) to be generated, and
wherein the data processing unit (7) is configured to adjust both the waveform tuning signal (FTW PLL ) corresponding to the one predetermined amplitude signal (A PLL (t)) representing the feedback signal (5) such as to minimize the error signal (6, 6'), and the other waveform tuning signals (FTW i ) corresponding to the other amplitude signals (A i (t)) representing the radio frequency (RF) output signals (RF out,i ) based on the adjusted waveform tuning signal (FTW PLL ) of the predetermined amplitude signal (A PLL (t)) representing the feedback signal (5).
The invention further describes a radio frequency (RF) power generator (1, 20, 30), an arrangement (35, 40, 45, 50, 55) of at least two such radio frequency (RF) power generators (1, 20, 30), and a method each for generating a plurality of synchronized radio frequency (RF) output signals (RF out,i ).
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