- 专利标题: MEMORY DEVICE, SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
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申请号: EP21186919.3申请日: 2021-07-21
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公开(公告)号: EP3944321A1公开(公告)日: 2022-01-26
- 发明人: LIN, Meng-Han , CHIA, Han-Jong , LIU, Yi-Ching , HUANG, Chia-En , WANG, Sheng-Chen , YANG, Feng-Cheng , LIN, Chung-Te
- 申请人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 申请人地址: TW Hsinchu 300-78 No. 8, Li-Hsin Rd. 6 Hsinchu Science Park
- 代理机构: Valea AB
- 优先权: US202017121757 20201215
- 主分类号: H01L27/11587
- IPC分类号: H01L27/11587 ; H01L27/11595 ; H01L27/11597
摘要:
A memory device, a semiconductor device and manufacturing methods for forming the memory device and the semiconductor device are provided. The memory device include a stacking structure, a switching layer, channel layers and pairs of conductive pillars. The stacking structure includes alternately stacked isolation layers and word lines, and extends along a first direction. The stacking structure has a staircase portion and a connection portion at an edge region of the stacking structure. The connection portion extends along the staircase portion and located aside the staircase portion, and may not be shaped into a staircase structure. The switching layer covers a sidewall of the stacking structure. The channel layers cover a sidewall of the switching layer, and are laterally spaced apart from one another along the first direction. The pairs of conductive pillars stand on the substrate, and in lateral contact with the switching layer through the channel layers.
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