- 专利标题: SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MODULE
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申请号: EP21192855.1申请日: 2021-08-24
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公开(公告)号: EP3993061A1公开(公告)日: 2022-05-04
- 发明人: GEJO, Ryohei , SAKANO, Tatsunori , KATO, Takahiro
- 申请人: Kabushiki Kaisha Toshiba , Toshiba Electronic Devices & Storage Corporation
- 申请人地址: JP Minato-ku Tokyo 1-1, Shibaura 1-Chome,; JP Tokyo 105-0023 1-1, Shibaura 1-chome Minato-ku
- 代理机构: Moreland, David
- 优先权: JP2020183559 20201102
- 主分类号: H01L29/08
- IPC分类号: H01L29/08 ; H01L29/423 ; H01L29/739
摘要:
According to one embodiment, a semiconductor device includes an emitter electrode (51), a collector electrode (52), an emitter-side trench gate electrode (53) and a collector-side trench gate electrode (54). It furthermore includes a semiconductor member, and first and second insulating members. The semiconductor member is located between the emitter and collector electrodes, and includes a first (n-type) semiconductor drift region (11), a second (p-type) semiconductor region (12) between the first semiconductor region and the first electrode, a third (n-type) semiconductor region (13) between the second semiconductor region and the first electrode, a fourth (p-type) semiconductor region (14) between the second semiconductor region and the first electrode, a fifth (p-type) semiconductor region (15) between the first semiconductor region and the second electrode, a sixth (n-type) semiconductor region (16) between the fifth semiconductor region and the second electrode, and a seventh (p-type) semiconductor region (17) between the fifth semiconductor region and the second electrode. The p-type body contact regions at the emitter (14) and at the collector side (17) may be different by a factor of 20 as far as their doping levels or their volumes are concerned.
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