发明公开
- 专利标题: SEMICONDUCTOR DEVICE
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申请号: EP19952365.5申请日: 2019-11-12
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公开(公告)号: EP4044214A1公开(公告)日: 2022-08-17
- 发明人: HUANG, Ray , XU, Jeffrey Junhao , ZHANG, Rui
- 申请人: Huawei Technologies Co., Ltd.
- 申请人地址: CN Shenzhen, Guangdong 518129 Huawei Administration Building, Bantian, Longgang District,
- 代理机构: Goddar, Heinz J.
- 国际公布: WO2021092764 20210520
- 主分类号: H01L21/60
- IPC分类号: H01L21/60
摘要:
A semiconductor device (200) is provided, including a substrate (210), and an active circuit (220) and a dummy circuit (230) that are mutually insulated. The dummy circuit (230) includes a lightly-doped P base (231) disposed in the substrate (210), a heavily-doped dummy source drain region (232) disposed in the P base (231), a dummy metal layer (235) disposed on a surface of the substrate (210), and a metal column (233) connecting the dummy source drain region (232) and the dummy metal layer (235). The heavily-doped dummy source drain region (232) and the lightly-doped P base (231) form non-directional low-impedance resistance, so that charges accumulated on a metal conductor rapidly transfer in a direction perpendicular to the substrate (210). This reduces damage caused by the charges to a circuit, and improves reliability and a yield rate of a chip.
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