- 专利标题: THREE-DIMENSIONAL MEMORY DEVICE CONTAINING OXIDATION-RESISTANT CONTACT STRUCTURES AND METHODS OF MAKING THE SAME
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申请号: EP21893102.0申请日: 2021-06-03
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公开(公告)号: EP4049311A1公开(公告)日: 2022-08-31
- 发明人: TAKII, Eisuke , HASHIMOTO, Hiraku , KOYAMA, Shin
- 申请人: SanDisk Technologies LLC
- 申请人地址: US Addison, Texas 75001 5080 Spectrum Drive Suite 1050W
- 代理机构: Dehns
- 优先权: US202016952526 20201119
- 国际公布: WO2022108623 20220527
- 主分类号: H01L23/522
- IPC分类号: H01L23/522 ; H01L27/11575 ; H01L27/11565 ; H01L27/11573 ; H01L27/11529 ; H01L27/11526
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