发明公开
- 专利标题: GLASS AND METHOD FOR PRODUCING THE SAME, AND MEMBER AND APPARATUS USING THE SAME
-
申请号: EP22168468.1申请日: 2022-04-14
-
公开(公告)号: EP4082976A1公开(公告)日: 2022-11-02
- 发明人: ITO, Masahiro , ARAI, Kazuyoshi
- 申请人: Tosoh Corporation
- 申请人地址: JP Yamaguchi 746-8501 4560, Kaisei-cho, Shunan-shi
- 代理机构: TBK
- 优先权: JP2021070929 20210420
- 主分类号: C03C3/062
- IPC分类号: C03C3/062 ; H01L21/00 ; C03B20/00 ; C03C3/06 ; C03B11/00
摘要:
A glass comprising at least one oxide of Si and a di- or higher-valent metal element, the glass containing no bubbles with diameters of more than 0.1 mm, wherein an occupied area fraction of bubbles with diameters of 0.1 mm or less is 0.05% or less. A semiconductor production apparatus and a liquid crystal production apparatus comprising a glass member comprising this glass. A method for producing a glass, comprising the steps of (1) placing raw material powders for at least one oxide of Si and a di- or higher-valent metal element in a container, mixing the raw material powders together and then melting the mixture by heating under reduced pressure to obtain a melt; (2-1) pressurizing the melt in a He gas atmosphere, or (2-2) heating the melt in an inert gas atmosphere other than a He gas atmosphere and then pressurizing the melt in the inert gas atmosphere; and (3) cooling the melt.
信息查询