- 专利标题: CLOSED-LOOP MICROELECTROMECHANICAL ACCELEROMETER WITH COMPENSATION OF SPURIOUS VIBRATION MODES AND PROCESS FOR MANUFACTURING A MICROELECTROMECHANICAL ACCELEROMETER
-
申请号: EP22183947.5申请日: 2022-07-08
-
公开(公告)号: EP4123313A1公开(公告)日: 2023-01-25
- 发明人: GATTERE, Gabriele , DARMANIN, Jean Marie , RIZZINI, Francesco , VALZASINA, Carlo
- 申请人: STMicroelectronics S.r.l.
- 申请人地址: IT 20864 Agrate Brianza (MB) Via C. Olivetti, 2
- 代理机构: Studio Torta S.p.A.
- 优先权: IT202100019694 20210723
- 主分类号: G01P15/08
- IPC分类号: G01P15/08 ; B81B5/00 ; G01P15/125 ; G01P15/13
摘要:
A closed-loop microelectromechanical accelerometer includes a substrate (23) of semiconductor material, an out-of-plane sensing mass (13) and feedback electrodes (17a-17d). The out-of-plane sensing mass (13), of semiconductor material, has a first side (13a) facing the supporting body (11) and a second side (13b) opposite to the first side (13a). The out-of-plane sensing mass (13) is also connected to the supporting body (11) to oscillate around a non-barycentric fulcrum axis (F) parallel to the first side (13a) and to the second side (13b) and perpendicular to an out-of-plane sensing axis (Z). The feedback electrodes (17a-17d) are capacitively coupled to the sensing mass (13) and are configured to apply opposite electrostatic forces (F FB1 , F FB2 ) to the sensing mass (13).
公开/授权文献
信息查询
IPC分类: