发明公开
- 专利标题: SEMICONDUCTOR DEVICE
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申请号: EP23180030.1申请日: 2020-11-25
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公开(公告)号: EP4236665A2公开(公告)日: 2023-08-30
- 发明人: WANG, Hui-Lin , HSU, Po-Kai , FAN, Ju-Chun , LIN, Yi-Yu , HSU, Ching-Hua , CHEN, Hung-Yueh
- 申请人: United Microelectronics Corp.
- 申请人地址: TW Hsin-Chu City 300 No. 3, Lin-Hsin Rd. 2 Science-Based Industrial Park
- 代理机构: Isarpatent
- 优先权: CN202011088594 20201013
- 主分类号: H10N59/00
- IPC分类号: H10N59/00
摘要:
A semiconductor device, comprising: a substrate; a first dielectric layer disposed on the substrate, the first dielectric layer around a first metal interconnection; a second dielectric layer disposed on the first dielectric layer, the second dielectric layer around a via and a second metal interconnection, the second metal interconnection directly contacting the first metal interconnection; and a third dielectric layer disposed on the second dielectric layer, the third dielectric layer around a first magnetic tunneling junction, MTJ, structure and a third metal interconnection, wherein the third metal interconnection directly contacts top surfaces of the first MTJ structure and the second metal interconnection, and the first MTJ structure directly contacts the via.
公开/授权文献
- EP4236665A3 SEMICONDUCTOR DEVICE 公开/授权日:2023-11-01
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