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公开(公告)号:EP4236665A3
公开(公告)日:2023-11-01
申请号:EP23180030.1
申请日:2020-11-25
发明人: WANG, Hui-Lin , HSU, Po-Kai , FAN, Ju-Chun , LIN, Yi-Yu , HSU, Ching-Hua , CHEN, Hung-Yueh
摘要: A semiconductor device, comprising: a substrate; a first dielectric layer disposed on the substrate, the first dielectric layer around a first metal interconnection; a second dielectric layer disposed on the first dielectric layer, the second dielectric layer around a via and a second metal interconnection, the second metal interconnection directly contacting the first metal interconnection; and a third dielectric layer disposed on the second dielectric layer, the third dielectric layer around a first magnetic tunneling junction, MTJ, structure and a third metal interconnection, wherein the third metal interconnection directly contacts top surfaces of the first MTJ structure and the second metal interconnection, and the first MTJ structure directly contacts the via.
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公开(公告)号:EP3896692A1
公开(公告)日:2021-10-20
申请号:EP20184745.6
申请日:2020-07-08
发明人: WANG, Hui-Lin , HSU, Po-Kai , CHEN, Hung-Yueh , WANG, Yu-Ping
摘要: A method for fabricating a semiconductor device includes the steps of: forming a first metal interconnection on a substrate; forming a stop layer on the first metal interconnection; removing the stop layer to form a first opening; forming an electromigration enhancing layer in the first opening; and forming a second metal interconnection on the electromigration enhancing layer. Preferably, top surfaces of the electromigration enhancing layer and the stop layer are coplanar.
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公开(公告)号:EP3905250A1
公开(公告)日:2021-11-03
申请号:EP20184796.9
申请日:2020-07-08
发明人: WANG, Hui-Lin , HSU, Po-Kai , JHANG, Jing-Yin , WANG, Yu-Ping , CHEN, Hung-Yueh , CHEN, Wei
摘要: A method for fabricating a semiconductor device includes the steps of: forming a magnetic tunneling junction (MTJ) on a substrate; forming a first inter-metal dielectric (IMD) layer around the MTJ; forming a first metal interconnection adjacent to the MTJ; forming a stop layer on the first IMD layer; removing the stop layer to form an opening; and forming a channel layer in the opening to electrically connect the MTJ and the first metal interconnection.
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公开(公告)号:EP3790064A1
公开(公告)日:2021-03-10
申请号:EP20174589.0
申请日:2020-05-14
发明人: WANG, Hui-Lin , HSU, Po-Kai , WENG, Chen-Yi , JHANG, Jing-Yin , WANG, Yu-Ping , CHEN, Hung-Yueh
摘要: A method for fabricating semiconductor device includes the steps of: forming a substrate having a magnetic tunneling junction (MTJ) region and a logic region; forming a MTJ on the MTJ region; forming a top electrode on the MTJ; forming an inter-metal dielectric (IMD) layer around the MTJ; removing the IMD layer directly on the top electrode to form a recess; forming a first hard mask on the IMD layer and into the recess; removing the first hard mask and the IMD layer on the logic region to form a contact hole; and forming a metal layer in the recess and the contact hole to form a connecting structure on the top electrode and a metal interconnection on the logic region.
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公开(公告)号:EP4202931A1
公开(公告)日:2023-06-28
申请号:EP23151392.0
申请日:2020-05-14
发明人: WANG, Hui-Lin , HSU, Po-Kai , WENG, Chen-Yi , JHANG, Jing-Yin , WANG, Yu-Ping , CHEN, Hung-Yueh
摘要: A method for fabricating semiconductor device includes the steps of: forming a substrate having a magnetic tunneling junction (MTJ) region and a logic region; forming a MTJ on the MTJ region; forming a top electrode on the MTJ; forming an inter-metal dielectric (IMD) layer around the MTJ; removing the IMD layer directly on the top electrode to form a recess; forming a first hard mask on the IMD layer and into the recess; removing the first hard mask and the IMD layer on the logic region to form a contact hole; and forming a metal layer in the recess and the contact hole to form a connecting structure on the top electrode and a metal interconnection on the logic region.
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公开(公告)号:EP3852161A1
公开(公告)日:2021-07-21
申请号:EP20174591.6
申请日:2020-05-14
发明人: TSAI, Ya-Huei , HUANG, Rai-Min , WANG, Yu-Ping , CHEN, Hung-Yueh
摘要: A layout pattern for magnetoresistive random access memory (MRAM) includes a substrate having a first active region, a second active region, and a word line connecting region between the first active region and the second active region and a gate pattern extending from the first active region to the second active region, in which the gate pattern includes a H-shape according to a top view. Preferably, the gate pattern includes a first gate pattern extending along a first direction from the first active region to the second active region, a second gate pattern extending along the first direction from the first active region to the second active region, and a third gate pattern connecting the first gate pattern and the second gate pattern along a second direction.
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公开(公告)号:EP3767676A1
公开(公告)日:2021-01-20
申请号:EP20169305.8
申请日:2020-04-14
发明人: HUANG, Rai-Min , CHEN, Hung-Yueh , TSAI, Ya-Huei , WANG, Yu-Ping
IPC分类号: H01L27/22
摘要: A magnetic memory cell (100) includes a substrate (10) having a memory region (MA), a transistor (200) within the memory region, a first dielectric layer (310) disposed on the substrate, a landing pad (MP) in the first dielectric layer, a second dielectric layer (320) covering the first dielectric layer and the landing pad, a cylindrical memory stack (MS) in the second dielectric layer, and a source line (SL) in the first dielectric layer. The first dielectric layer covers the memory region and the transistor. The landing pad is situated in a first horizontal plane and is coupled to a drain region (202) of the transistor. The cylindrical memory stack has a bottom electrode (BE) connected to the landing pad and a top electrode (TE) electrically connected to a bit line (BL). The source line is situated in a second horizontal plane and is connected to a source region (203)of the transistor. The second horizontal plane is lower than the first horizontal plane.
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公开(公告)号:EP4236665A2
公开(公告)日:2023-08-30
申请号:EP23180030.1
申请日:2020-11-25
发明人: WANG, Hui-Lin , HSU, Po-Kai , FAN, Ju-Chun , LIN, Yi-Yu , HSU, Ching-Hua , CHEN, Hung-Yueh
IPC分类号: H10N59/00
摘要: A semiconductor device, comprising: a substrate; a first dielectric layer disposed on the substrate, the first dielectric layer around a first metal interconnection; a second dielectric layer disposed on the first dielectric layer, the second dielectric layer around a via and a second metal interconnection, the second metal interconnection directly contacting the first metal interconnection; and a third dielectric layer disposed on the second dielectric layer, the third dielectric layer around a first magnetic tunneling junction, MTJ, structure and a third metal interconnection, wherein the third metal interconnection directly contacts top surfaces of the first MTJ structure and the second metal interconnection, and the first MTJ structure directly contacts the via.
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公开(公告)号:EP3985749A1
公开(公告)日:2022-04-20
申请号:EP20209712.7
申请日:2020-11-25
发明人: WANG, Hui-Lin , HSU, Po-Kai , FAN, Ju-Chun , LIN, Yi-Yu , HSU, Ching-Hua , CHEN, Hung-Yueh
摘要: A semiconductor device includes a substrate, a first dielectric layer, a second dielectric layer, and a third dielectric layer. The first dielectric layer is disposed on the substrate, around a first metal interconnection. The second dielectric layer is disposed on the first dielectric layer, around a via and a second metal interconnection. The second metal interconnection directly contacts the first metal interconnection. The third dielectric layer is disposed on the second dielectric layer, around a first magnetic tunneling junction (MTJ) structure and a third metal interconnection. The third metal interconnection directly contacts the first MTJ structure and the second metal interconnection, and the first MTJ structure directly contacts the via.
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公开(公告)号:EP3817055A1
公开(公告)日:2021-05-05
申请号:EP20174720.1
申请日:2020-05-14
发明人: WANG, Hui-Lin , HSU, Po-Kai , JHANG, Jing-Yin , CHEN, Hung-Yueh , WANG, Yu-Ping , WU, Jia-Rong , HUANG, Rai-Min , TSAI, Ya-Huei , CHANG, I-Fan
IPC分类号: H01L27/22
摘要: The disclosed MRAM device includes an array of magnetic tunneling junction (MTJ) elements on a substrate (12), wherein a dummy MTJ (46, 50) in which a bottom surface thereof is not connected to any metal is arranged between a first MTJ (44, 52) and a second MTJ (48). In an alternative arrangement two adjacent MTJs are placed between two dummy MTJs. Preferably, the device further includes metal interconnections (42) under the first and second MTJs, and an inter-metal dielectric layer (40) around the metal interconnections and directly under the dummy MTJ(s).
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