- 专利标题: SOLAR CELL AND PREPARATION METHOD THEREFOR
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申请号: EP22942530.1申请日: 2022-12-26
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公开(公告)号: EP4365965A1公开(公告)日: 2024-05-08
- 发明人: CHEN, Hao , WANG, Xiupeng , XING, Guoqiang
- 申请人: Tongwei Solar (Meishan) Co., Ltd.
- 申请人地址: CN Meishan, Sichuan 620041 No.8-1 Jinxiu Road Xiuwen Town Dongpo District
- 专利权人: Tongwei Solar (Meishan) Co., Ltd.
- 当前专利权人: Tongwei Solar (Meishan) Co., Ltd.
- 当前专利权人地址: CN Meishan, Sichuan 620041 No.8-1 Jinxiu Road Xiuwen Town Dongpo District
- 代理机构: Marks & Clerk LLP
- 优先权: CN 202210554893 2022.05.19
- 国际申请: CN2022141804 2022.12.26
- 国际公布: WO2023221510 2023.11.23
- 主分类号: H01L31/18
- IPC分类号: H01L31/18 ; H01L31/068
摘要:
The present application provides a solar cell and a preparation method thereof. The method includes: forming a target amorphous silicon layer on a side of a silicon wafer using a preset process, and then performing an annealing treatment on the target amorphous silicon layer to convert the target amorphous silicon layer into a target polycrystalline silicon layer, wherein the preset process includes at least one cycle period, the at least one cycle period comprises: depositing a target amorphous silicon preformed layer with a preset thickness and performing a hydrogen gas plasma treatment on the target amorphous silicon preformed layer, wherein the preset thickness of the target amorphous silicon preformed layer is less than or equal to a thickness of the target amorphous silicon layer. This method can effectively improve a crystallization rate of converting amorphous silicon into polycrystalline silicon, improving field passivation performance and contact performance of the solar cell.
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