发明公开

SUCTION PAD
摘要:
A suction pad (10) includes a body (12) and a sponge member (20). The body includes a negative pressure chamber (16), and a plurality of communication passages (18) communicating with the negative pressure chamber. The sponge member includes a plurality of cavities (22) opening toward a workpiece. The cavities communicate with the negative pressure chamber through the communication passages, and flow passage adjustment valves (26) for adjusting a flow passage area are arranged in the communication passages, respectively. The suction pad further includes a pressure detection port (50) for detecting pressure in at least one cavity among the plurality of cavities.
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