- 专利标题: VARIABLE HEIGHT SLANTED GRATING METHOD
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申请号: EP24176444.8申请日: 2019-07-01
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公开(公告)号: EP4394486A2公开(公告)日: 2024-07-03
- 发明人: EVANS, Morgan , MEYER TIMMERMAN THIJSSEN, Rutger
- 申请人: Applied Materials, Inc.
- 申请人地址: US Santa Clara, CA 95054 3050 Bowers Avenue
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: US Santa Clara, CA 95054 3050 Bowers Avenue
- 代理机构: Zimmermann & Partner Patentanwälte mbB
- 优先权: US 1862700756P 2018.07.19
- 分案原申请号: 19837506.5 2019.07.01
- 主分类号: G02B27/01
- IPC分类号: G02B27/01
摘要:
An optical device is disclosed. The optical device includes a substrate having an optically transparent grating layer disposed thereon, a recess formed in the grating layer, the recess having a depth that changes from a first end of the recess to a second end of the recess, and a plurality of slanted grating structures formed in the grating layer below the recess and partially defining a portion of the recess. A depth of the plurality of slanted grating structures changes from the first end to the second end, and an angle of each of the plurality of slanted grating structures relative to a plane normal to the substrate is between about 25 degrees and 45 degrees.
公开/授权文献
- EP4394486A3 VARIABLE HEIGHT SLANTED GRATING METHOD 公开/授权日:2024-08-07
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