公开(公告)号：EP3878007A1

公开(公告)日：2021-09-15

申请号：EP19881467.5

申请日：2019-10-18

申请人： Applied Materials, Inc.

发明人： MEYER TIMMERMAN THIJSSEN, Rutger ,  OLSON, Joseph C. ,  EVANS, Morgan

IPC分类号： H01L21/265 ,  H01L21/768 ,  H01L21/3065 ,  H01L21/033 ,  H01L21/311

公开(公告)号：EP4100987A1

公开(公告)日：2022-12-14

申请号：EP21750582.5

申请日：2021-01-12

申请人： Applied Materials, Inc.

发明人： MEYER TIMMERMAN THIJSSEN, Rutger ,  EVANS, Morgan ,  PEPLOSKI, Maurice Emerson ,  OLSON, Joseph C. ,  SOLDI, Thomas James

IPC分类号： H01J37/305 ,  H01J37/08 ,  G02B5/18

公开(公告)号：EP4394486A2

公开(公告)日：2024-07-03

申请号：EP24176444.8

申请日：2019-07-01

申请人： Applied Materials, Inc.

发明人： EVANS, Morgan ,  MEYER TIMMERMAN THIJSSEN, Rutger

IPC分类号： G02B27/01

CPC分类号： G02B5/1857 ,  G02B6/0016 ,  G02B6/0038 ,  G02B27/0172 ,  G02B2027/017420130101

摘要： An optical device is disclosed. The optical device includes a substrate having an optically transparent grating layer disposed thereon, a recess formed in the grating layer, the recess having a depth that changes from a first end of the recess to a second end of the recess, and a plurality of slanted grating structures formed in the grating layer below the recess and partially defining a portion of the recess. A depth of the plurality of slanted grating structures changes from the first end to the second end, and an angle of each of the plurality of slanted grating structures relative to a plane normal to the substrate is between about 25 degrees and 45 degrees.

公开(公告)号：EP3899607A1

公开(公告)日：2021-10-27

申请号：EP19899230.7

申请日：2019-12-05

申请人： Applied Materials, Inc.

发明人： OLSON, Joseph C. ,  EVANS, Morgan ,  MEYER TIMMERMAN THIJSSEN, Rutger

IPC分类号： G02B5/18

公开(公告)号：EP3824331A1

公开(公告)日：2021-05-26

申请号：EP19837506.5

申请日：2019-07-01

申请人： Applied Materials, Inc.

发明人： EVANS, Morgan ,  MEYER TIMMERMAN THIJSSEN, Rutger

IPC分类号： G02B5/18

公开(公告)号：EP4394486A3

公开(公告)日：2024-08-07

申请号：EP24176444.8

申请日：2019-07-01

申请人： Applied Materials, Inc.

发明人： EVANS, Morgan ,  MEYER TIMMERMAN THIJSSEN, Rutger

IPC分类号： G02B5/18 ,  G02B27/01

CPC分类号： G02B5/1857 ,  G02B6/0016 ,  G02B6/0038 ,  G02B27/0172 ,  G02B2027/017420130101

摘要： An optical device is disclosed. The optical device includes a substrate having an optically transparent grating layer disposed thereon, a recess formed in the grating layer, the recess having a depth that changes from a first end of the recess to a second end of the recess, and a plurality of slanted grating structures formed in the grating layer below the recess and partially defining a portion of the recess. A depth of the plurality of slanted grating structures changes from the first end to the second end, and an angle of each of the plurality of slanted grating structures relative to a plane normal to the substrate is between about 25 degrees and 45 degrees.

公开(公告)号：EP4118468A1

公开(公告)日：2023-01-18

申请号：EP21768291.3

申请日：2021-02-05

申请人： Applied Materials, Inc.

发明人： KURUNCZI, Peter ,  OLSON, Joseph ,  EVANS, Morgan ,  MEYER TIMMERMAN THIJSSEN, Rutger

IPC分类号： G02B5/18 ,  G02B27/01

公开(公告)号：EP3956629A1

公开(公告)日：2022-02-23

申请号：EP20791522.4

申请日：2020-04-06

申请人： Applied Materials, Inc.

发明人： FU, Jinxin ,  WANG, Yifei ,  MCMACKIN, Ian Matthew ,  MEYER TIMMERMAN THIJSSEN, Rutger ,  GODET, Ludovic ,  OLSON, Joseph C. ,  EVANS, Morgan

IPC分类号： G01B9/02 ,  G01J3/02 ,  G02B27/10

公开(公告)号：EP3900020A1

公开(公告)日：2021-10-27

申请号：EP19901253.5

申请日：2019-12-06

申请人： Applied Materials, Inc.

发明人： OLSON, Joseph C. ,  GODET, Ludovic ,  MEYER TIMMERMAN THIJSSEN, Rutger ,  EVANS, Morgan ,  FU, Jinxin

IPC分类号： H01L21/265 ,  H01L21/67 ,  H01L23/538

公开(公告)号：EP3900027A1

公开(公告)日：2021-10-27

申请号：EP19900499.5

申请日：2019-11-25

申请人： Applied Materials, Inc.

发明人： EVANS, Morgan ,  OLSON, Joseph C.

IPC分类号： H01L21/67 ,  H01L21/306 ,  H01L21/425 ,  H01L21/027 ,  H01L27/15 ,  H01L25/075