发明公开
- 专利标题: SEMICONDUCTOR MEMORY DEVICE
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申请号: EP23205348.8申请日: 2023-10-23
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公开(公告)号: EP4415497A2公开(公告)日: 2024-08-14
- 发明人: LEE, Wonsok , LEE, Juho , KIM, Seunghyun , JUNG, Wooje , CHO, Minhee
- 申请人: Samsung Electronics Co., Ltd.
- 申请人地址: KR Suwon-si, Gyeonggi-do 16677 129, Samsung-ro Yeongtong-gu
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-si, Gyeonggi-do 16677 129, Samsung-ro Yeongtong-gu
- 代理机构: Marks & Clerk LLP
- 优先权: KR 230017260 2023.02.09
- 主分类号: H10B12/00
- IPC分类号: H10B12/00 ; H01L29/786
摘要:
A semiconductor memory device, which may include a substrate, a lower conductive line on the substrate, an isolation insulating layer on the lower conductive line and including a channel trench, a channel structure inside the channel trench and including a first oxide semiconductor material, an interfacial conductive pattern between the lower conductive line and a lower surface of the channel structure, a gate dielectric layer that covers the channel structure within the channel trench, an upper conductive line on the gate dielectric layer within the channel trench, a conductive contact pattern on the channel structure, an interfacial oxide semiconductor pattern between the channel structure and the conductive contact pattern and including a second oxide semiconductor material, and a capacitor structure including a lower electrode connected to the conductive contact pattern.
公开/授权文献
- EP4415497A3 SEMICONDUCTOR MEMORY DEVICE 公开/授权日:2024-08-28
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