在通过颗粒过滤器捕获膜的污染物杀菌清洗，在不超纯水制造装置供给的污染物以供应管道的用途，也的水分，杀菌清洗，系统污染后 预防，在很短的时间，用于在使用的水质点好（POU）供给超纯水。 至少罐11，泵12，热交换器13，紫外线装置14，离子交换器15，具有第一颗粒去除膜装置16的超纯水制造装置，平行于所述第一微粒过滤器膜装置16 第二微粒除去膜装置17在无菌水中的一部分提供，并且冲洗水被供给到第一微粒过滤器膜装置16，以及从​​供水侧排出到浓缩水侧，而不膜渗透，天平 到通过，以所述第二微粒过滤器膜装置17。

During sterilizing and washing, without supplying contaminants in ultrapure water production system into the supply pipe to the water points of use, also, after the sterilizing and washing, the system contamination by contaminants captured by the fine particle removal membrane prevention to a short period of time to supply ultra-pure water of good water quality to water use point (point of use). At least a tank 11, pump 12, heat exchanger 13, an ultraviolet apparatus 14, ion exchanger 15, the ultrapure water production system having a first particulate filter membrane device 16, parallel to the first particulate filter membrane device 16 the second a fine particle removal membrane device 17 is provided in a portion of the sterile water and flushing water is supplied to the first particulate filter membrane device 16, discharged from the water supply side to the concentrated water side without membrane permeation, and the remainder to It is passed through to the second particulate removal membrane device 17.