发明公开
- 专利标题: 리소그라피용 블록 코폴리머
- 专利标题(英): Block copolymers for lithography
- 专利标题(中): 嵌入式嵌段共聚物
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申请号: KR1020120093872申请日: 2012-08-27
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公开(公告)号: KR1020140027807A公开(公告)日: 2014-03-07
- 发明人: 고행덕 , 김미정 , 박연정 , 정성준
- 申请人: 삼성전자주식회사
- 申请人地址: ***, Samsung-ro, Yeongtong-gu, Suwon-si, Gyeonggi-do, Republic of Korea
- 专利权人: 삼성전자주식회사
- 当前专利权人: 삼성전자주식회사
- 当前专利权人地址: ***, Samsung-ro, Yeongtong-gu, Suwon-si, Gyeonggi-do, Republic of Korea
- 代理商 팬코리아특허법인
- 主分类号: C08F297/04
- IPC分类号: C08F297/04 ; C08F279/06 ; G03F7/004
摘要:
Provided is a block copolymer for lithography, having 3,000-30,000 of an average molecular weight number comprising: a first polymer block comprising a first monomer selected from a diene monomer, an aromatic vinyl monomer, a heteroaromatic vinyl monomer; and a second polymer block comprising a second monomer selected from a (meth)acrylate derivative, wherein the first polymer block and the second polymer block have at least 0.2 of an interaction parameter (χ) indicated by the mathematical formula 1 below: ′Mathematical Formula 1′ (In the formula above, χ refers to an interaction parameter, Vm to the molar volume of major polymer blocks, R to a gas constant, T to a temperature (K), δ_A to a solubility parameter of a homopolymer comprising the first monomer, and δ_B to a solubility parameter of a homopolymer comprising the second monomer).
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