发明公开
KR1020140027807A 리소그라피용 블록 코폴리머 无效 - Withdrawn
嵌入式嵌段共聚物

  • 专利标题: 리소그라피용 블록 코폴리머
  • 专利标题(英): Block copolymers for lithography
  • 专利标题(中): 嵌入式嵌段共聚物
  • 申请号: KR1020120093872
    申请日: 2012-08-27
  • 公开(公告)号: KR1020140027807A
    公开(公告)日: 2014-03-07
  • 发明人: 고행덕김미정박연정정성준
  • 申请人: 삼성전자주식회사
  • 申请人地址: ***, Samsung-ro, Yeongtong-gu, Suwon-si, Gyeonggi-do, Republic of Korea
  • 专利权人: 삼성전자주식회사
  • 当前专利权人: 삼성전자주식회사
  • 当前专利权人地址: ***, Samsung-ro, Yeongtong-gu, Suwon-si, Gyeonggi-do, Republic of Korea
  • 代理商 팬코리아특허법인
  • 主分类号: C08F297/04
  • IPC分类号: C08F297/04 C08F279/06 G03F7/004
리소그라피용 블록 코폴리머
摘要:
Provided is a block copolymer for lithography, having 3,000-30,000 of an average molecular weight number comprising: a first polymer block comprising a first monomer selected from a diene monomer, an aromatic vinyl monomer, a heteroaromatic vinyl monomer; and a second polymer block comprising a second monomer selected from a (meth)acrylate derivative, wherein the first polymer block and the second polymer block have at least 0.2 of an interaction parameter (χ) indicated by the mathematical formula 1 below: ′Mathematical Formula 1′ (In the formula above, χ refers to an interaction parameter, Vm to the molar volume of major polymer blocks, R to a gas constant, T to a temperature (K), δ_A to a solubility parameter of a homopolymer comprising the first monomer, and δ_B to a solubility parameter of a homopolymer comprising the second monomer).
信息查询
0/0