Various embodiments provide a particle sensor including: a first carrier, the first carrier including at least one heating structure and a light detecting structure, at least one spacer structure disposed over the first carrier, a second carrier disposed over the at least one spacer structure, the second carrier including a light emitting structure, wherein the first carrier, the second carrier and the at least one spacer structure are arranged to provide a channel for a fluid flow, wherein the light emitting structure is configured to emit light into the channel and wherein the light detecting structure is configured to detect light from the channel.