发明授权
- 专利标题: Sound transducer structure and method for manufacturing a sound transducer structure
-
申请号: US15290877申请日: 2016-10-11
-
公开(公告)号: US10034100B2公开(公告)日: 2018-07-24
- 发明人: Alfons Dehe , Stefan Barzen , Marc Fueldner
- 申请人: Infineon Technologies AG
- 申请人地址: DE Neubiberg
- 专利权人: Infineon Technologies AG
- 当前专利权人: Infineon Technologies AG
- 当前专利权人地址: DE Neubiberg
- 代理机构: Shumaker & Sieffert, P.A.
- 优先权: DE102006051982 20061103; DE102006055147 20061122
- 主分类号: H04R25/00
- IPC分类号: H04R25/00 ; H04R19/04 ; H04R19/00 ; H04R31/00 ; H04R7/00
摘要:
A sound transducer structure includes a membrane and a counter electrode. The membrane includes a first main surface in a sound transducing region made of a membrane material, and an edge region. The counter electrode includes a second main surface arranged in parallel to the first main surface of the membrane on a side of a free volume opposite the first main surface of the membrane. A plurality of elevations extend in the sound transducing region from the second main surface of the counter electrode into the free volume. The membrane and the counter electrode are arranged to provide a capacity therebetween. The membrane comprises a corrugation groove extending in the sound transducing region from the first main surface of the membrane into the free volume.
公开/授权文献
信息查询