Invention Grant
- Patent Title: Process for large-scale ammonothermal manufacturing of gallium nitride boules
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Application No.: US14599335Application Date: 2015-01-16
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Publication No.: US10036099B2Publication Date: 2018-07-31
- Inventor: Mark P. D'Evelyn , Dirk Ehrentraut , Derrick S. Kamber , Bradley C. Downey
- Applicant: SLT TECHNOLOGIES, INC.
- Applicant Address: US CA Los Angeles
- Assignee: SLT TECHNOLOGIES, INC.
- Current Assignee: SLT TECHNOLOGIES, INC.
- Current Assignee Address: US CA Los Angeles
- Agency: Patterson & Sheridan, LLP
- Main IPC: C30B7/10
- IPC: C30B7/10 ; C30B29/40 ; H01L21/02 ; B01J3/00 ; B01J3/04 ; B01J3/06 ; B30B11/00

Abstract:
Large-scale manufacturing of gallium nitride boules using m-plane or wedge-shaped seed crystals can be accomplished using ammonothermal growth methods. Large-area single crystal seed plates are suspended in a rack, placed in a large diameter autoclave or internally-heated high pressure apparatus along with ammonia and a mineralizer, and crystals are grown ammonothermally. The orientation of the m-plane or wedge-shaped seed crystals are chosen to provide efficient utilization of the seed plates and of the volume inside the autoclave or high pressure apparatus.
Public/Granted literature
- US20150132926A1 PROCESS FOR LARGE-SCALE AMMONOTHERMAL MANUFACTURING OF GALLIUM NITRIDE BOULES Public/Granted day:2015-05-14
Information query
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