- 专利标题: Monolithic visible-infrared focal plane array on silicon
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申请号: US15416301申请日: 2017-01-26
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公开(公告)号: US10043845B2公开(公告)日: 2018-08-07
- 发明人: Ning Li , Devendra K. Sadana , Robert L. Wisnieff
- 申请人: International Business Machines Corporation
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Harrington & Smith
- 代理商 Louis J. Percello
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; H01L27/146 ; H01L31/105 ; H01L31/18 ; H01L31/028 ; H01L31/0304 ; H01L31/0352
摘要:
A structure includes a silicon substrate; silicon readout circuitry disposed on a first portion of a top surface of the substrate and a radiation detecting pixel disposed on a second portion of the top surface of the substrate. The pixel has a plurality of radiation detectors connected with the readout circuitry. The plurality of radiation detectors are composed of at least one visible wavelength radiation detector containing germanium and at least one infrared wavelength radiation detector containing a Group III-V semiconductor material. A method includes providing a silicon substrate; forming silicon readout circuitry on a first portion of a top surface of the substrate and forming a radiation detecting pixel, on a second portion of the top surface of the substrate, that has a plurality of radiation detectors formed to contain a visible wavelength detector composed of germanium and an infrared wavelength detector composed of a Group III-V semiconductor material.
公开/授权文献
- US20170133427A1 Monolithic Visible-Infrared Focal Plane Array On Silicon 公开/授权日:2017-05-11
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