- 专利标题: Plating apparatus and plating method
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申请号: US14727674申请日: 2015-06-01
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公开(公告)号: US10047454B2公开(公告)日: 2018-08-14
- 发明人: Yuji Araki , Jumpei Fujikata , Masashi Shimoyama , Mizuki Nagai
- 申请人: EBARA CORPORATION
- 申请人地址: JP Tokyo
- 专利权人: EBARA CORPORATION
- 当前专利权人: EBARA CORPORATION
- 当前专利权人地址: JP Tokyo
- 代理机构: Baker & Hostetler LLP
- 优先权: JP2014-118554 20140609
- 主分类号: C25D21/12
- IPC分类号: C25D21/12
摘要:
A plating apparatus 10 includes a rectifier 18 configured to apply a DC current to a substrate, and a plating apparatus control unit 30 that instructs the rectifier 18 on a value of the DC current. The plating apparatus control unit 30 has a setting unit 32 for setting a current value, a storage unit 34 that stores a relational expression between an instructed current value on which the rectifier 18 is instructed and an actual current value which the rectifier 18 outputs in accordance with the instructed current value, a calculation unit 38 that corrects the current value set by the setting unit 32 on the basis of the above-mentioned relational expression to calculate a corrected current value, and an instruction unit 36 that instructs the rectifier 18 on the corrected current value calculated by the calculation unit 38.
公开/授权文献
- US20150354084A1 PLATING APPARATUS AND PLATING METHOD 公开/授权日:2015-12-10
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