Invention Grant
- Patent Title: Circuit for detection of failure of movable MEMS mirror
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Application No.: US15348087Application Date: 2016-11-10
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Publication No.: US10048488B2Publication Date: 2018-08-14
- Inventor: Elik Haran , Gilad Adler
- Applicant: STMicroelectronics Ltd
- Applicant Address: IL Netanya
- Assignee: STMicroelectronics Ltd
- Current Assignee: STMicroelectronics Ltd
- Current Assignee Address: IL Netanya
- Agency: Crowe & Dunlevy
- Main IPC: G02B26/12
- IPC: G02B26/12 ; G02B26/08 ; G02B26/10 ; B81B3/00 ; G01R31/28

Abstract:
Disclosed herein is a circuit for determining failure of a movable MEMS mirror. The circuit includes a mirror position sensor associated with the movable MEMS mirror and that generates an analog output as a function of angular position of the movable MEMS mirror. An analog to digital converter converts the analog output from the mirror position sensor to a digital mirror sense signal. Failure detection circuitry calculates a difference between the digital mirror sense signal at a first instant in time and the digital mirror sense signal at a second instant in time, determines whether the difference exceeds a threshold, and indicates failure of the movable MEMS mirror as a function of the difference failing to exceed the threshold.
Public/Granted literature
- US20180129036A1 CIRCUIT FOR DETECTION OF FAILURE OF MOVABLE MEMS MIRROR Public/Granted day:2018-05-10
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