Invention Grant
- Patent Title: MEMS device oscillating about two axes and having a position detecting system, in particular of a piezoresistive type
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Application No.: US15266063Application Date: 2016-09-15
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Publication No.: US10048491B2Publication Date: 2018-08-14
- Inventor: Massimiliano Merli , Roberto Carminati , Marco Rossi
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Crowe & Dunlevy
- Priority: IT102016000033284 20160331
- Main IPC: G02B26/08
- IPC: G02B26/08 ; H01L41/09 ; H03H9/02 ; G01L1/18 ; G01L1/16 ; G01L5/00 ; G02B26/10 ; H04N5/225 ; G06F3/042

Abstract:
A MEMS device includes a platform carried by a frame via elastic connection elements configured to enable rotation of the platform about a first axis. A bearing structure supports the frame through first and second elastic suspension arms configured to enable rotation of the frame about a second axis transverse to the first axis. The first and second elastic suspension arms are anchored to the bearing structure through respective anchorage portions arranged offset with respect to the second axis. A stress sensor formed by first and second sensor elements respectively arranged on the first and second suspension arms is positioned in proximity of the anchorage portions, on a same side of the second axis, in a symmetrical position with respect to the first axis.
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