Invention Grant
- Patent Title: Iterative defect filtering process
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Application No.: US15019894Application Date: 2016-02-09
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Publication No.: US10049441B2Publication Date: 2018-08-14
- Inventor: Saar Shabtay , Idan Kaizerman , Amir Wachs
- Applicant: Applied Materials Israel Ltd.
- Applicant Address: US IL Rehovot
- Assignee: APPLIED MATERIALS ISRAEL LTD.
- Current Assignee: APPLIED MATERIALS ISRAEL LTD.
- Current Assignee Address: US IL Rehovot
- Agency: Lowenstein Sandler LLP
- Main IPC: G06T7/00
- IPC: G06T7/00 ; G06K9/52 ; G06K9/68 ; G06K9/46

Abstract:
A method for classifying defects of a wafer, the method is executed by a computerized system, the method may include obtaining defect candidate information about a group of defect candidates, wherein the defect candidate information comprises values of attributes per each defect candidate of the group; selecting, by a processor of the computerized system, a selected sub-group of defect candidates in response to values of attributes of defect candidates that belong to at least the selected sub-group; classifying defect candidates of the selected sub-group to provide selected sub-group classification results; repeating, until fulfilling a stop condition: selecting an additional selected sub-group of defect candidates in response to (a) values of attributes of defect candidates that belong to at least the additional selected sub-group; and (b) classification results obtained from classifying at least one other selected sub-group; and classifying defect candidates of the additional selected sub-group to provide additional selected sub-group classification results.
Public/Granted literature
- US20160163038A1 ITERATIVE DEFECT FILTERING PROCESS Public/Granted day:2016-06-09
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