Invention Grant
- Patent Title: Asymmetric semiconductor device and method of forming same
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Application No.: US14853373Application Date: 2015-09-14
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Publication No.: US10049942B2Publication Date: 2018-08-14
- Inventor: Anthony I. Chou , Judson R. Holt , Arvind Kumar , Henry K. Utomo
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Hoffman Warnick LLC
- Agent Yuanmin Cai
- Main IPC: H01L21/265
- IPC: H01L21/265 ; H01L21/266 ; H01L29/167 ; H01L29/78 ; H01L21/8238 ; H01L29/08 ; H01L29/16 ; H01L29/161 ; H01L29/165 ; H01L27/092

Abstract:
An aspect of the disclosure provides for an asymmetric semiconductor device. The asymmetric semiconductor device may comprise: a substrate; and a fin-shaped field effect transistor (FINFET) disposed on the substrate, the FINFET including: a set of fins disposed proximate a gate; a first epitaxial region disposed on a source region on the set of fins, the first epitaxial region having a first height; and a second epitaxial region disposed on a drain region on the set of fins, the second epitaxial region having a second height, wherein the first height is distinct from the second height.
Public/Granted literature
- US20170076991A1 ASYMMETRIC SEMICONDUCTOR DEVICE AND METHOD OF FORMING SAME Public/Granted day:2017-03-16
Information query
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