Invention Grant
- Patent Title: Thin-film transistor, method of fabricating thin-film transistor, and display device
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Application No.: US14956894Application Date: 2015-12-02
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Publication No.: US10050150B2Publication Date: 2018-08-14
- Inventor: Emi Kobayashi , Arinobu Kanegae , Yusuke Fukui
- Applicant: JOLED INC.
- Applicant Address: JP Tokyo
- Assignee: JOLED INC.
- Current Assignee: JOLED INC.
- Current Assignee Address: JP Tokyo
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: JP2014-245398 20141203
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L29/66 ; H01L29/45

Abstract:
A thin-film transistor includes: an oxide semiconductor layer having a channel region, a source region, and a drain region; a gate insulating layer disposed above the oxide semiconductor layer; a gate electrode disposed at a position that is above the gate insulating layer and opposing the channel region; and a metal oxide layer stacked on the oxide semiconductor layer and in contact with the source region and the drain region. The metal oxide layer includes, as a main component, an oxide of a second metal whose bond dissociation energy with oxygen is greater than that of a first metal included in the oxide semiconductor layer. A first concentration ratio of oxygen to the second metal in an interface layer between the metal oxide layer and the oxide semiconductor layer is greater than a second concentration ratio of the same in a bulk layer of the metal oxide layer.
Public/Granted literature
- US20160163868A1 THIN-FILM TRANSISTOR, METHOD OF FABRICATING THIN-FILM TRANSISTOR, AND DISPLAY DEVICE Public/Granted day:2016-06-09
Information query
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