Invention Grant
- Patent Title: Magnetic memory device having buffer layer
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Application No.: US15373342Application Date: 2016-12-08
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Publication No.: US10050192B2Publication Date: 2018-08-14
- Inventor: Johan Swerts , Kiroubanand Sankaran , Tsann Lin , Geoffrey Pourtois
- Applicant: IMEC VZW
- Applicant Address: BE Leuven
- Assignee: IMEC vzw
- Current Assignee: IMEC vzw
- Current Assignee Address: BE Leuven
- Agency: Knobbe, Martens, Olson & Bear LLP
- Priority: EP15199646 20151211
- Main IPC: H01L43/08
- IPC: H01L43/08 ; H01L27/22 ; G11C11/16 ; H01L43/10 ; H01L43/12

Abstract:
The disclosed technology generally relates to magnetic memory devices, and more particularly to spin transfer torque magnetic random access memory (STT-MRAM) devices having a magnetic tunnel junction (MTJ), and further relates to methods of fabricating the STT-MRAM devices. In an aspect, a magnetoresistive random access memory (MRAM) device has a magnetic tunnel junction (MTJ). The MTJ includes a magnetic reference layer including CoFeB, a magnetic free layer comprising CoFeB, and a barrier layer including MgO. The barrier layer is interposed between the magnetic reference layer and the magnetic free layer. The barrier layer has a thickness adapted to tunnel electrons between the magnetic reference layer and the magnetic free layer sufficient to cause a change in the magnetization direction of the variable magnetization under a bias. The MTJ further comprises a buffer layer comprising one or more of Co, Fe, CoFe and CoFeB, where the buffer layer is doped with one or both of C and N.
Public/Granted literature
- US20170170390A1 MAGNETIC MEMORY DEVICE HAVING BUFFER LAYER Public/Granted day:2017-06-15
Information query
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