Invention Grant
- Patent Title: Particle counter
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Application No.: US15555376Application Date: 2016-03-04
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Publication No.: US10054529B2Publication Date: 2018-08-21
- Inventor: Tomonobu Matsuda , Masaki Shimmura , Yuki Yamakawa
- Applicant: RION Co., Ltd.
- Applicant Address: JP Tokyo
- Assignee: RION Co., Ltd.
- Current Assignee: RION Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Rankin, Hill & Clark LLP
- Priority: JP2015-045175 20150306
- International Application: PCT/JP2016/056787 WO 20160304
- International Announcement: WO2016/143696 WO 20160915
- Main IPC: G01N21/00
- IPC: G01N21/00 ; G01N15/02 ; G01N15/06 ; G01N15/14 ; G01N21/45 ; G01N15/00

Abstract:
An irradiation optical system 12 irradiates a fluid flowing in a flow passage 2a with one light among a plurality of lights obtained by branching light from a light source 1 and forms the detection area. A detection optical system 13 makes scattered light with a different direction from an optical axis of the irradiation optical system enter a beam splitter 17 among the scattered lights from particles contained in the fluid in this detection area. Meanwhile, a beam expander 16 makes another light among the plurality of lights enter the beam splitter 17 as reference light. A detector 4 receives an interference light, by the scattered light and the reference light, obtained by the beam splitter 17 by light receiving elements and generates a detection signal corresponding to the interference light. A counting unit 6 counts the particles based on this detection signal.
Public/Granted literature
- US20180038781A1 PARTICLE COUNTER Public/Granted day:2018-02-08
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