- 专利标题: MEMS gas chromatograph and method of forming a separator column for a MEMS gas chromatograph
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申请号: US15535522申请日: 2015-12-16
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公开(公告)号: US10060888B2公开(公告)日: 2018-08-28
- 发明人: Ando Feyh , Gary O'Brien , Bongsang Kim , Jochen Stehle
- 申请人: ROBERT BOSCH GMBH , Ando Feyh , Gary O'Brien , Bongsang Kim , Jochen Stehle
- 申请人地址: DE Stuttgart
- 专利权人: Robert Bosch GmbH
- 当前专利权人: Robert Bosch GmbH
- 当前专利权人地址: DE Stuttgart
- 代理机构: Maginot Moore & Beck LLP
- 国际申请: PCT/US2015/066076 WO 20151216
- 国际公布: WO2016/100504 WO 20160623
- 主分类号: G01N30/60
- IPC分类号: G01N30/60 ; G01N30/02 ; B81C1/00 ; B81B1/00
摘要:
A micro gas chromatograph includes one or more separator columns formed within a device layer. The separator columns have small channel cross sections and long channel lengths with atomic-smooth channel sidewalls enabling a high channel packaging density, multiple channels positioned on top of each other, and channel segments that are thermally decoupled from the substrates. The micro gas-chromatograph also enables electrostatic and thermal actuators to be positioned in close proximity to the separator columns such that the material passing through the columns is one or more of locally heated, locally cooled, and electrically biased.
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