Invention Grant
- Patent Title: Sensor, object positioning system, lithographic apparatus and device manufacturing method
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Application No.: US15505885Application Date: 2015-07-20
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Publication No.: US10061213B2Publication Date: 2018-08-28
- Inventor: Johannes Antonius Gerardus Akkermans , Ruud Antonius Catharina Maria Beerens , Sander Christiaan Broers , Jeroen Johannes Theodorus Hendrikus De Best , Adrianus Marinus Wouter Heeren , George Alois Leonie Leenknegt , Bo Lenssen , Hendrikus Johannes Schellens , Peter Van Der Krieken , Theodorus Petrus Maria Cadee , Jan Van Eijk , Richard Henricus Adrianus Van Lieshout
- Applicant: ASML NETHERLANDS B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- Priority: EP14183218 20140902
- International Application: PCT/EP2015/066519 WO 20150720
- International Announcement: WO2016/034320 WO 20160310
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G01L1/16 ; G01P15/09
Abstract:
A sensor includes two shear-mode piezoelectric transducers, wherein each piezoelectric transducer has a bottom surface and a top surface, wherein the top surfaces of the piezoelectric transducers are rigidly connected to each other, and wherein the bottom surfaces of the piezoelectric transducers are configured to be attached to an object to be measured.
Public/Granted literature
- US10012914B2 Sensor, object positioning system, lithographic apparatus and device manufacturing method Public/Granted day:2018-07-03
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